Modal phase measuring deflectometry

被引:89
作者
Huang, Lei [1 ]
Xue, Junpeng [1 ,2 ]
Gao, Bo [1 ,3 ,4 ]
McPherson, Chris [5 ]
Beverage, Jacob [5 ]
Idir, Mourad [1 ]
机构
[1] Brookhaven Natl Lab, NSLS II, 50 Rutherford Dr, Upton, NY 11973 USA
[2] Sichuan Univ, Sch Aeronaut & Astronaut, Chengdu 610065, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China
[4] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[5] Arizona Opt Syst, Tucson, AZ 85747 USA
关键词
WAVE-FRONT RECONSTRUCTION; 3D SHAPE MEASUREMENT; ZERNIKE POLYNOMIALS; MIRROR; CALIBRATION;
D O I
10.1364/OE.24.024649
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In this work, a model based method is applied to phase measuring deflectometry, named modal phase measuring deflectometry. The height and slopes of the surface under test are represented by mathematical models and updated by optimizing the model coefficients to minimize the discrepancy between the reprojection in ray tracing and the actual measurement. The pose of the screen relative to the camera is pre-calibrated and further optimized together with the shape coefficients of the surface under test. Simulations and experiments are conducted to demonstrate the feasibility of the proposed approach. (C) 2016 Optical Society of America
引用
收藏
页码:24649 / 24664
页数:16
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