Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter

被引：58

作者：

Errando-Herranz, Carlos ^{[1
]}

Niklaus, Frank ^{[1
]}

Stemme, Goran ^{[1
]}

Gylfason, Kristinn B. ^{[1
]}

机构：

[1] KTH Royal Inst Technol, Micro & Nanosyst, SE-10044 Stockholm, Sweden

来源：

OPTICS LETTERS | 2015年 / 40卷 / 15期

基金：

欧洲研究理事会; 瑞典研究理事会;

关键词：

MICRORING RESONATORS; OPTICAL NETWORKS; SWITCH; MEMS;

D O I：

10.1364/OL.40.003556

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We experimentally demonstrate a microelectromechanically (MEMS) tunable photonic ring resonator add-drop filter, fabricated in a simple silicon-on-insulator (SOI) based process. The device uses electrostatic parallel plate actuation to perturb the evanescent field of a silicon waveguide, and achieves a 530 pm resonance wavelength tuning, i.e., more than a fourfold improvement compared to previous MEMS tunable ring resonator add-drop filters. Moreover, our device has a static power consumption below 100 nW, and a tuning rate of -62 pm/V, i.e., the highest reported rate for electrostatic tuning of ring resonator add-drop filters. (C) 2015 Optical Society of America

引用

页码：3556 / 3559

页数：4

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