Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter

被引：58

作者：

Errando-Herranz, Carlos ^{[1
]}

Niklaus, Frank ^{[1
]}

Stemme, Goran ^{[1
]}

Gylfason, Kristinn B. ^{[1
]}

机构：

[1] KTH Royal Inst Technol, Micro & Nanosyst, SE-10044 Stockholm, Sweden

来源：

OPTICS LETTERS | 2015年 / 40卷 / 15期

基金：

欧洲研究理事会; 瑞典研究理事会;

关键词：

MICRORING RESONATORS; OPTICAL NETWORKS; SWITCH; MEMS;

D O I：

10.1364/OL.40.003556

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We experimentally demonstrate a microelectromechanically (MEMS) tunable photonic ring resonator add-drop filter, fabricated in a simple silicon-on-insulator (SOI) based process. The device uses electrostatic parallel plate actuation to perturb the evanescent field of a silicon waveguide, and achieves a 530 pm resonance wavelength tuning, i.e., more than a fourfold improvement compared to previous MEMS tunable ring resonator add-drop filters. Moreover, our device has a static power consumption below 100 nW, and a tuning rate of -62 pm/V, i.e., the highest reported rate for electrostatic tuning of ring resonator add-drop filters. (C) 2015 Optical Society of America

引用

页码：3556 / 3559

页数：4

共 19 条

[1] Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever [J].

Abdulla, S. M. C. ;

Kauppinen, L. J. ;

Dijkstra, M. ;

de Boer, M. J. ;

Berenschot, E. ;

Jansen, H. V. ;

de Ridder, R. M. ;

Krijnen, G. J. M. .

OPTICS EXPRESS, 2011, 19 (17) :15864-15878

[2]

[Anonymous], C LAS EL INT QUANT E

[3] Low power and compact reconfigurable multiplexing devices based on silicon microring resonators [J].

Dong, Po ;

Qian, Wei ;

Liang, Hong ;

Shafiiha, Roshanak ;

Feng, Ning-Ning ;

Feng, Dazeng ;

Zheng, Xuezhe ;

Krishnamoorthy, Ashok V. ;

Asghari, Mehdi .

OPTICS EXPRESS, 2010, 18 (10) :9852-9858

[4]

Errando-Herranz C., 2015, C MICR EL MECH SYST, P53

[5]

Errando-Herranz C., 2015, TRANSDUCERS, P1001

[6] A Wide-Tuning Silicon Ring-Resonator Composed of Coupled Freestanding Waveguides [J].

Hoang Manh Chu ;

Hane, Kazuhiro .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2014, 26 (14) :1411-1413

[7] Reconfigurable optical add-drop multiplexer using microring resonators [J].

Klein, EJ ;

Geuzebroek, DH ;

Kelderman, H ;

Sengo, G ;

Baker, N ;

Driessen, A .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2005, 17 (11) :2358-2360

[8] Device Requirements for Optical Interconnects to Silicon Chips [J].

Miller, David A. B. .

PROCEEDINGS OF THE IEEE, 2009, 97 (07) :1166-1185

[9] Cascaded Microresonator-Based Matrix Switch for Silicon On-Chip Optical Interconnection [J].

Poon, Andrew W. ;

Luo, Xianshu ;

Xu, Fang ;

Chen, Hui .

PROCEEDINGS OF THE IEEE, 2009, 97 (07) :1216-1238

[10] Wavelength-selective reflector based on a circular array of coupled microring resonators [J].

Poon, JKS ;

Scheuer, J ;

Yariv, A .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (05) :1331-1333

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