Effect of Pt content on structure and magnetic properties of Fe100-xPtx films deposited on thermally oxidized Si substrates by rapid thermal annealing

被引：3
作者：
Chen, S. C. [1 ,2 ]
Chen, C. D. [1 ,2 ]
Sun, T. H. [3 ]
Ou, S. L. [4 ]
Shen, C. L. [5 ]
Su, W. H. [1 ,2 ]
机构：
[1] Ming Chi Univ Technol, Dept Mat Engn, Taipei 243, Taiwan
[2] Ming Chi Univ Technol, Ctr Thin Film Technol & Applicat, Taipei 243, Taiwan
[3] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
[4] Natl Chung Hsing Univ, Dept Mat Sci & Engn, Taichung 40227, Taiwan
[5] Natl Taiwan Univ, Inst Mat Sci & Engn, Taipei 106, Taiwan
来源：
VACUUM | 2013年 / 87卷
关键词：
Fe100-xPtx films; Magnetic properties; Rapid thermal annealing; THIN-FILMS; MICROSTRUCTURE; ALLOY;
D O I：
10.1016/j.vacuum.2012.03.037
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Fe100-xPLx films with Pt contents (x) = 29-65 at.% were deposited directly onto thermally oxidized Si(100) substrate by dc magnetron sputtering. The films were then post-annealed at 700 degrees C for 3 min by rapid thermal annealing (RTA) at a high heating ramp rate of 100 degrees C/s. Experimental results show that Fe3Pt film displayed (111) preferred orientation and tended towards in-plane magnetic anisotropy when the Pt content was 29 at.%. When the Pt content was increased to 49 at.%, the FePt film inclined towards (001)-texture and perpendicular magnetic anisotropy. Its out-of-plane coercivity (Hc(perpendicular to)), saturation magnetization (M-s) and out-of-plane squareness (S-perpendicular to) reached 1010 kA/m, 0.47 T and 0.8, respectively. These results reveal its significant potential as perpendicular magnetic recording media for high-density recording. Upon further increasing the Pt content to 65 at.%, the coercivity of the films decreased drastically to below 65 kA/m and tended towards in-plane magnetic anisotropy. (C) 2012 Elsevier Ltd. All rights reserved.
引用
收藏
页码：205 / 208
页数：4
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