Sandwich structure of Pd doped nanostructure TiO2 film as O2 sensor

被引：10

作者：

Wang, Hairong ^{[1
,2
]}

Sun, Quantao ^{[1
,2
]}

Chen, Lei ^{[1
,2
]}

Zhao, Yulong ^{[1
,2
]}

机构：

[1] State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China

[2] Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Shaanxi, Peoples R China

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2013年 / 84卷 / 09期

基金：

中国国家自然科学基金;

关键词：

THIN-FILMS; FAST-RESPONSE; TEMPERATURE;

D O I：

10.1063/1.4820923

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this paper, we investigated the sensing properties of sandwich structure of TiO2/Pd/TiO2 thin films at various operating temperatures and oxygen partial pressures. The nanostructure TiO2 thin films were prepared by the sol-gel method. Various thickness of Pd buried layer was deposited by magnetron sputtering of a pure Pd target. The films were characterized using X-ray diffraction analysis and SEM. It was found that TiO2/Pd/TiO2 thin films have the p-type behavior while the pure TiO2 thin film is n-type semiconductor materials. We found that the structure of TiO2/Pd/TiO2 thin films with 10 s sputtering Pd layer has a better stability at 240 degrees C. (C) 2013 AIP Publishing LLC.

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页数：4

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共 12 条

[1] XPS study of Nb-doped oxygen sensing TiO2 thin films prepared by sol-gel method [J].

Atashbar, MZ ;

Sun, HT ;

Gong, B ;

Wlodarski, W ;

Lamb, R .

THIN SOLID FILMS, 1998, 326 (1-2) :238-244

[2] TiO2 thin films from titanium butoxide:: Synthesis, Pt addition, structural stability, microelectronic processing and gas-sensing properties [J].

Epifani, Mauro ;

Helwig, Andreas ;

Arbiol, Jordi ;

Diaz, Rauel ;

Francioso, Luca ;

Siciliano, Pietro ;

Mueller, Gerhard ;

Morante, Joan R. .

SENSORS AND ACTUATORS B-CHEMICAL, 2008, 130 (02) :599-608

[3] Copper on-top-sputtering induced modification of tin dioxide thin film gas sensors [J].

Galdikas, A ;

Mironas, A ;

Senuliene, D ;

Setkus, A ;

Göpel, W ;

Schierbaum, KD .

SENSORS AND ACTUATORS B-CHEMICAL, 1999, 58 (1-3) :330-337

[4] Study of the resistance behavior of anatase and rutile thick films towards carbon monoxide and oxygen at high temperatures and possibilities for sensing applications [J].

Li, Xiagoan ;

Ramasamy, Ramamoorthy ;

Dutta, Prabir K. .

SENSORS AND ACTUATORS B-CHEMICAL, 2009, 143 (01) :308-315

[5] Strategies to enhance the carbon monoxide sensitivity of tin oxide thin films [J].

Mandayo, GG ;

Castaño, E ;

Gracia, FJ ;

Cirera, A ;

Cornet, A ;

Morante, JR .

SENSORS AND ACTUATORS B-CHEMICAL, 2003, 95 (1-3) :90-96

[6] Built-in active filter for an improved response to carbon monoxide combining thin- and thick-film technologies [J].

Mandayo, GG ;

Castaño, E ;

Gracia, FJ ;

Cirera, A ;

Cornet, A ;

Morante, JR .

SENSORS AND ACTUATORS B-CHEMICAL, 2002, 87 (01) :88-94

[7] Electrical conduction mechanism and gas sensing properties of Pd-doped TiO2 films [J].

Mardare, Diana ;

Iftimie, Nicoleta ;

Crisan, Maria ;

Raileanu, Malina ;

Yildiz, A. ;

Coman, T. ;

Pomoni, K. ;

Vomvas, A. .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 2011, 357 (07) :1774-1779

[8] Temperature and doping effects on performance of titania thin film lambda probe [J].

Presicce, DS ;

Francioso, L ;

Epifani, M ;

Siciliano, P ;

Ficarella, A .

SENSORS AND ACTUATORS B-CHEMICAL, 2005, 111 :52-57

[9] Mechanism of highly sensitive and fast response Cr doped TiO2 oxygen gas sensor [J].

Sharma, RK ;

Bhatnagar, MC ;

Sharma, GL .

SENSORS AND ACTUATORS B-CHEMICAL, 1997, 45 (03) :209-215

[10] Investigation of sol-gel prepared CeO2-TiO2 thin films for oxygen gas sensing [J].

Trinchi, A ;

Li, YX ;

Wlodarski, W ;

Kaciulis, S ;

Pandolfi, L ;

Viticoli, S ;

Comini, E ;

Sberveglieri, G .

SENSORS AND ACTUATORS B-CHEMICAL, 2003, 95 (1-3) :145-150