Vertical resonant couplers with precise coupling efficiency control fabricated by wafer bonding

被引：77

作者：

Tishinin, DV ^{[1
]}

Dapkus, PD ^{[1
]}

Bond, AE ^{[1
]}

Kim, I ^{[1
]}

Lin, CK ^{[1
]}

O'Brien, J ^{[1
]}

机构：

[1] Univ So Calif, Dept Elect Engn, Ctr Photon Technol, Los Angeles, CA 90089 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1999年 / 11卷 / 08期

关键词：

microresonators; optical couplers; optical planar waveguides; optical resonators; waveguide couplers; wavelength-division multiplexing;

D O I：

10.1109/68.775327

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A fabrication technique to create complex three-dimensional waveguide devices is effected by using wafer bonding to process two sides of an epitaxial structure. Vertical resonant couplers with precise control over coupling efficiency are demonstrated.

引用

页码：1003 / 1005

页数：3

共 7 条

[1] Planar disorder- and native-oxide-defined photopumped AlAs-GaAs superlattice minidisk lasers
Chen, EI
Holonyak, N
Ries, MJ
[J]. JOURNAL OF APPLIED PHYSICS, 1996, 79 (11) : 8204 - 8209
[2] FORESI J, 1996, LEOS ANN M
[3] Microring resonator channel dropping filters
Little, BE
Chu, ST
Haus, HA
Foresi, J
Laine, JP
[J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1997, 15 (06) : 998 - 1005
[4] Fused InP-GaAs vertical coupler filters
Liu, B
Shakouri, A
Abraham, P
Chiu, YJ
Zhang, S
Bowers, JE
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 1999, 11 (01) : 93 - 95
[5] Fused vertical couplers
Liu, B
Shakouri, A
Abraham, P
Kim, BG
Jackson, AW
Bowers, JE
[J]. APPLIED PHYSICS LETTERS, 1998, 72 (21) : 2637 - 2638
[6] Waveguide-coupled AlGaAs/GaAs microcavity ring and disk resonators with high finesse and Z1.6-nm free spectral range
Rafizadeh, D
Zhang, JP
Hagness, SC
Taflove, A
Stair, KA
Ho, ST
Tiberio, RC
[J]. OPTICS LETTERS, 1997, 22 (16) : 1244 - 1246
[7] TISHININ DV, 1998, LEOS 11 ANN M 1998 O

← 1 →