Vertical resonant couplers with precise coupling efficiency control fabricated by wafer bonding

被引：78

作者：

Tishinin, DV ^{[1
]}

Dapkus, PD ^{[1
]}

Bond, AE ^{[1
]}

Kim, I ^{[1
]}

Lin, CK ^{[1
]}

O'Brien, J ^{[1
]}

机构：

[1] Univ So Calif, Dept Elect Engn, Ctr Photon Technol, Los Angeles, CA 90089 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1999年 / 11卷 / 08期

关键词：

microresonators; optical couplers; optical planar waveguides; optical resonators; waveguide couplers; wavelength-division multiplexing;

D O I：

10.1109/68.775327

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A fabrication technique to create complex three-dimensional waveguide devices is effected by using wafer bonding to process two sides of an epitaxial structure. Vertical resonant couplers with precise control over coupling efficiency are demonstrated.

引用

页码：1003 / 1005

页数：3

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