Sol-gel derived RIB waveguides

被引：0

作者：

Karasinski, Pawel ^{[1
]}

Rogozinski, Roman ^{[1
]}

机构：

[1] Silesian Tech Univ, Inst Phys, PL-44100 Gliwice, Poland

来源：

OPTICAL FIBERS AND THEIR APPLICATIONS 2008 | 2008年 / 7120卷

关键词：

sol-gel; silica-titania film; RIB waveguide;

D O I：

10.1117/12.804514

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

RIB waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO2:TiO2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the layers SiO2:TiO2 was carried out in water solutions of ammonia fluoride. The paper presents results of theoretical analysis, technological characteristics, and power distributions in the obtained strip waveguides.

引用

页数：4

共 7 条

[1]

Karasinski P, 2004, OPT APPL, V34, P467

[2] Rib waveguides fabricated by means of chemical etching of sol-gel SiO2:TiO2 films [J].

Karasinski, P ;

Rogozinski, R .

OPTICS COMMUNICATIONS, 2005, 245 (1-6) :237-242

[3]

Karasinski P, 2003, OPT APPL, V33, P477

[4]

Karasinski P, 2002, OPT APPL, V32, P775

[5] Technology of ion exchange in glass and its application in waveguide planar sensors [J].

Opilski, A ;

Rogozinski, R ;

Blahut, M ;

Karasinski, P ;

Gut, K ;

Opilski, Z .

OPTICAL ENGINEERING, 1997, 36 (06) :1625-1638

[6]

Scherrer G.W, 1990, DRYING SOL GEL SCI

[7] Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics [J].

Wörhoff, K ;

Driessen, A ;

Lambeck, PV ;

Hilderink, LTH ;

Linders, PWC ;

Popma, TJA .

SENSORS AND ACTUATORS A-PHYSICAL, 1999, 74 (1-3) :9-12

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