Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition

被引：22
作者：
Edy, Riyanto [1 ,2 ]
Huang, Xiaojiang [1 ]
Guo, Ying [1 ]
Zhang, Jing [1 ,2 ]
Shi, Jianjun [1 ,2 ]
机构：
[1] Donghua Univ, Coll Sci, Shanghai 201620, Peoples R China
[2] Donghua Univ, Coll Mat Sci & Engn, State Key Lab Modificat Chem Fibers & Polymer Mat, Shanghai 201620, Peoples R China
来源：
NANOSCALE RESEARCH LETTERS | 2013年 / 8卷
关键词：
Atomic layer deposition; PET film; Al2O3; coating; POLYMER; ALUMINUM; LASER;
D O I：
10.1186/1556-276X-8-79
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In this paper, polyethyleneterephthalate (PET) films with and without plasma pretreatment were modified by atomic layer deposition (ALD) and plasma-assisted atomic layer deposition (PA-ALD). It demonstrates that the Al2O3 films are successfully deposited onto the surface of PET films. The cracks formed on the deposited Al2O3 films in the ALD, plasma pretreated ALD, and PA-ALD were attributed to the energetic ion bombardment in plasmas. The surface wettability in terms of water contact angle shows that the deposited Al2O3 layer can enhance the wetting property of modified PET surface. Further characterizations of the Al2O3 films suggest that the elevated density of hydroxyl -OH group improve the initial growth of ALD deposition. Chemical composition of the Al2O3-coated PET film was characterized by X-ray photoelectron spectroscopy, which shows that the content of C 1s reduces with the growing of O 1s in the Al2O3-coated PET films, and the introduction of plasma in the ALD process helps the normal growth of Al2O3 on PET in PA-ALD.
引用
收藏
页数：9
相关论文
共 28 条
[1]   Effects of different laser and plasma treatments on the interface and adherence between evaporated aluminium and polyethylene terephthalate films: X-ray photoemission, and adhesion studies [J].
Ardelean, H ;
Petit, S ;
Laurens, P ;
Marcus, P ;
Arefi-Khonsari, F .
APPLIED SURFACE SCIENCE, 2005, 243 (1-4) :304-318
[2]   Optical, chemical and structural modification of oxygen irradiated PET [J].
Awasthi, Kamlendra ;
Kulshrestha, Vaibhav ;
Avasthi, D. K. ;
Vijay, Y. K. .
RADIATION MEASUREMENTS, 2010, 45 (07) :850-855
[3]   Atmospheric Pressure Process for Coating Particles Using Atomic Layer Deposition [J].
Beetstra, Renske ;
Lafont, Ugo ;
Nijenhuis, John ;
Kelder, Erik M. ;
van Ommen, J. Ruud .
CHEMICAL VAPOR DEPOSITION, 2009, 15 (7-9) :227-233
[4]   Surface modification of polymer fibre by the new atmospheric pressure cold plasma jet [J].
Cheng, Cheng ;
Zhang Liye ;
Zhan, Ru-Juan .
SURFACE & COATINGS TECHNOLOGY, 2006, 200 (24) :6659-6665
[5]   Protection of polymer from atomic-oxygen erosion using Al2O3 atomic layer deposition coatings [J].
Cooper, Russell ;
Upadhyaya, Hari P. ;
Minton, Timothy K. ;
Berman, Michael R. ;
Du, Xiaohua ;
George, Steven M. .
THIN SOLID FILMS, 2008, 516 (12) :4036-4039
[6]  
Crist B.V., 2005, Commercially Pure Binary Oxides and a few Common Carbonates and Hydroxides, V2
[7]   FTIR analysis of polyethylene terephthalate irradiated by MeV He+ [J].
Djebara, M. ;
Stoquert, J. P. ;
Abdesselam, M. ;
Muller, D. ;
Chami, A. C. .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 274 :70-77
[8]   Atomic layer deposition of Al2O3 films on polyethylene particles [J].
Ferguson, JD ;
Weimer, AW ;
George, SM .
CHEMISTRY OF MATERIALS, 2004, 16 (26) :5602-5609
[9]  
Heil SBS, 2008, THESIS TU EINDHOVEN
[10]   Thin Al2O3 barrier coatings onto temperature-sensitive packaging materials by atomic layer deposition [J].
Hirvikorpi, Terhi ;
Vaha-Nissi, Mika ;
Nikkola, Juha ;
Harlin, Ali ;
Karppinen, Maarit .
SURFACE & COATINGS TECHNOLOGY, 2011, 205 (21-22) :5088-5092
123