Influence of substrate and film thickness on polymer LIPSS formation

被引：36

作者：

Cui, Jing ^{[1
]}

Nogales, Aurora ^{[1
]}

Ezquerra, Tiberio A. ^{[1
]}

Rebollar, Esther ^{[2
]}

机构：

[1] CSIC, Inst Estruct Mat, Serrano 121, Madrid 28006, Spain

[2] CSIC, Inst Quim Fis Rocasolano, Serrano 119, E-28006 Madrid, Spain

来源：

APPLIED SURFACE SCIENCE | 2017年 / 394卷

关键词：

Laser-induced periodic surface structures; Polystyrene; Film thickness; Substrates properties; Pulse accumulation; PERIODIC SURFACE-STRUCTURES; NANOIMPRINT LITHOGRAPHY; REFRACTIVE-INDEX; LASER-ABLATION; TEMPERATURE; ROUGHNESS; SILICON;

D O I：

10.1016/j.apsusc.2016.10.045

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Here we focus on the influence of both, substrate and film thickness on polymer Laser Induced Periodic Surface Structures (LIPSS) formation in polymer films. For this aim a morphological description of ripples structures generated on spin-coated polystyrene (PS) films by a linearly polarized laser beam with a wavelength of 266 nm is presented. The influence of different parameters on the quality and characteristics of the formed laser-induced periodic surface structures (LIPSS) was investigated. We found that well-ordered LIPSS are formed either on PS films thinner than 200 nm or thicker than 400 nm supported on silicon substrates as well as on thicker free standing films. However less-ordered ripples are formed on silicon supported films with intermediate thicknesses in the range of 200-380 nm. The effect of the thermal and optical properties of the substrate on the quality of LIPSS was analyzed. Differences observed in the fluence and number of pulses needed for the onset of surface morphological modifications is explained considering two main effects which are: (1) The temperature increase on polymer surface induced by the action of cumulative laser irradiation and (2) The differences in thermal conductivity between the polymer and the substrate which strongly affect the heat dissipation generated by irradiation. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：125 / 131

页数：7

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