Tuneable IR Photodetectors for Spectroscopic Applications

被引：1

作者：

Antoszewski, J. ^{[1
]}

Nguyen, T. ^{[1
]}

Silva, K. K. M. B. D. ^{[1
]}

Faraone, L. ^{[1
]}

机构：

[1] Univ Western Australia, Sch Elect Elect & Comp Engn, Crawley 6009, Australia

来源：

26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012 | 2012年 / 47卷

关键词：

IR microspectrometers; MEMS; tuneable IR detectors;

D O I：

10.1016/j.proeng.2012.09.169

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The concept and realisation of infrared micro-spectrometers using MEMS based Fabry-Perot micro-filters integrated with IR photo-detectors are presented. By using five layer mirror structures, and stress optimisation in mirrors and actuators the tuning range from 1700nm to 2300nm has been achieved with maximum actuation voltage of only 18V RMS. The average FWHM of the transmission peak was measured to be 35nm, predominantly limited by thickness nonuniformity of individual mirror layers. (C) 2012 Elsevier Ltd.... Selection and/or peer-review under responsibility of the Symposium Cracoviense Sp. z.o.o.

引用

页码：406 / 409

页数：4

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