Towards Roll-to-Roll Deposition of High Quality Moisture Barrier Films on Polymers by Atmospheric Pressure Plasma Assisted Process

被引：58

作者：

Starostin, Sergey A. ^{[1
]}

Creatore, Mariadriana ^{[2
]}

Bouwstra, Jan B. ^{[3
]}

van de Sanden, Mauritius C. M. ^{[1
,2
]}

de Vries, Hindrik W. ^{[1
]}

机构：

[1] Dutch Inst Fundamental Energy Res DIFFER, NL-3430 BE Nieuwegein, Netherlands

[2] Eindhoven Univ Technol, Plasma & Mat Proc Grp, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands

[3] FUJIFILM Mfg Europe BV, Tilburg, Netherlands

来源：

PLASMA PROCESSES AND POLYMERS | 2015年 / 12卷 / 06期

关键词：

atmospheric pressure glow discharges (APGD); dielectric barrier discharges; gas diffusion barrier films; roll-to-roll reactors; water-vapour permeability; CHEMICAL-VAPOR-DEPOSITION; SIO2-LIKE FILMS; THIN-FILMS; DISCHARGE; COATINGS; LAYERS; TEMPERATURE; SMOOTH; CVD;

D O I：

10.1002/ppap.201400194

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An atmospheric pressure dielectric barrier discharge (DBD) was applied for the deposition of silica-like moisture barrier films on polyethylene 2,6 naphthalate foil. The diffuse plasma was sustained between two cylindrical drum electrodes in N-2/O-2/Ar gas flow with the addition of tetraethyl orthosilicate. The chemical composition, morphology and water vapour transmission rate of the moisture permeation barrier layers were studied as a function of the dynamic deposition rate and substrate temperature. It was demonstrated that dense silica-like layers of 100 nm thick with a good permeation barrier of approximate to 1.8 x 10(-3) g.m(-2).day (at 40 degrees C, 90% RH), corresponding to three orders of magnitude barrier improvement with respect to the pristine polymer, can be deposited in an atmospheric pressure process.

引用

页码：545 / 554

页数：10

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