Low-energy ion-induced tensile stress of self-assembled alkanethiol monolayers

被引:8
作者
Itakura, AN
Berger, R
Narushima, T
Kitajima, M
机构
[1] Natl Inst Mat Sci, Tsukuba, Ibaraki 3050047, Japan
[2] IBM Deutschland Speichersyst GmbH, Anal Lab & New Projects, D-55131 Mainz, Germany
[3] Natl Inst Mat Sci, Tsukuba, Ibaraki 3050047, Japan
关键词
D O I
10.1063/1.1478153
中图分类号
O59 [应用物理学];
学科分类号
摘要
Monolayers of alkanethiols on gold have been exposed to low energy Ar ion. A micromechanical cantilever sensor technique was used to determine in situ the influence of the ion dose on the surface stress in the monolayers. In contrast to compressive surface stress during self-assembled monolayer growth, a strong tensile surface stress of about -0.7 N/m was found when the sensor is exposed to Ar ions. This value is 3-4 times larger than the compressive surface stress. We attribute this stress to a reaction between the alkyl chains in the molecules of the alkanethiol monolayer. (C) 2002 American Institute of Physics.
引用
收藏
页码:3712 / 3714
页数:3
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