Tin dioxide inorganic nanolevel films with different liquid crystal molecular orientations for application in liquid crystal displays (LCDs)

被引:57
作者
Kang, Young-Gu [2 ]
Kim, Hyung-Jun [1 ]
Park, Hong-Gyu [1 ]
Kim, Byoung-Yong [1 ]
Seo, Dae-Shik [1 ]
机构
[1] Yonsei Univ, Informat Display Device Lab, Dept Elect & Elect Engn, Seoul 120749, South Korea
[2] Samsung Elect, LCD Res & Dev Ctr, Yongin 446711, Gyeonggi Do, South Korea
关键词
SNO2; THIN-FILMS; VERTICAL ALIGNMENT; OPTICAL-PROPERTIES; LAYER; LITHOGRAPHY; IONS; CELL; XPS;
D O I
10.1039/c2jm13689a
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We generated SnO2 alignment films with one of two liquid crystal (LC) molecular orientations: a stable, vertical orientation or a homogeneous orientation. We changed the molecular orientations by altering the growth temperature of radio-frequency (RF) magnetron sputtering. An ion-beam (IB) advanced system was used to achieve uniform alignment. We obtained two LC molecular orientations as demonstrated by the shift of the Sn 3d peaks and the altered-sub peaks of Sn2+, Sn4+ intensity on X-ray photoelectron spectroscopy (XPS) images of the various films. The electro-optical (EO) characteristics of the TN-LC and VA-LC displays on the high-k SnO2/HfO2 double films were measured; a reduction in threshold voltage, response time, and low power consumption were observed.
引用
收藏
页码:15969 / 15975
页数:7
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