Tunable thermo-optic filter for WDM applications

被引：6

作者：

Hohlfeld, D ^{[1
]}

Epmeier, M ^{[1
]}

Zappe, H ^{[1
]}

机构：

[1] Univ Freiburg, Inst Microsyst Technol, Lab Microopt, D-79110 Freiburg, Germany

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984334

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we present a novel MEMS-based concept for tunable optical filters for use in wavelength-division multiplexing (WDM) systems. Such a filter is essential for monitoring and reconfiguration of optical networks. Our device is based on a Fabry-Perot interferometer employing a silicon cavity and silicon-based dielectric Bragg mirrors. It is fabricated as a free-standing membrane. Wavelength tuning is achieved through thermal modulation of the resonator's optical thickness. We present the measurement of optical filter performance and tunability. Numerical simulation results of its steady-state and transient thermal behavior are also given.

引用

页码：564 / 567

页数：4

共 3 条

[1] A new and simple concept of tunable two-chip microcavities for filter applications in WDM systems
Aziz, M
Pfeiffer, J
Wohlfarth, M
Luber, C
Wu, S
Meissner, P
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 2000, 12 (11) : 1522 - 1524
[2] III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Perot detectors
Dehe, A
Peerlings, J
Pfeiffer, J
Riemenschneider, R
Vogt, A
Streubel, K
Kunzel, H
Meissner, P
Hartnagel, HL
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1998, 68 (1-3) : 365 - 371
[3] Silicon Fabry-Perot filter for WDM systems channels monitoring
Iodice, M
Cocorullo, G
Della Corte, FG
Rendina, I
[J]. OPTICS COMMUNICATIONS, 2000, 183 (5-6) : 415 - 418

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