Tunable thermo-optic filter for WDM applications

被引：6

作者：

Hohlfeld, D ^{[1
]}

Epmeier, M ^{[1
]}

Zappe, H ^{[1
]}

机构：

[1] Univ Freiburg, Inst Microsyst Technol, Lab Microopt, D-79110 Freiburg, Germany

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984334

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we present a novel MEMS-based concept for tunable optical filters for use in wavelength-division multiplexing (WDM) systems. Such a filter is essential for monitoring and reconfiguration of optical networks. Our device is based on a Fabry-Perot interferometer employing a silicon cavity and silicon-based dielectric Bragg mirrors. It is fabricated as a free-standing membrane. Wavelength tuning is achieved through thermal modulation of the resonator's optical thickness. We present the measurement of optical filter performance and tunability. Numerical simulation results of its steady-state and transient thermal behavior are also given.

引用

页码：564 / 567

页数：4

共 3 条

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