Controlled formation of organic layers on semiconductor surfaces

被引：74

作者：

Hovis, JS ^{[1
]}

Lee, S ^{[1
]}

Liu, HB ^{[1
]}

Hamers, RJ ^{[1
]}

机构：

[1] UNIV WISCONSIN,DEPT CHEM,MADISON,WI 53706

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1997年 / 15卷 / 04期

关键词：

D O I：

10.1116/1.589431

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

It has been shown that well-defined, ordered organic layers can be formed on the silicon (100) surface. This is achieved through the interaction of unsaturated C=C bonds with the oriented dimers of the reconstructed Si(100)-(2 X 1) surface. In this article, we present an investigation of the structure and chemical bonding of organic films prepared using different organic precursors, Data were obtained using scanning tunneling microscopy, Fourier-transform infrared spectroscopy, and x-ray photoelectron spectroscopy. The molecules investigated are cyclopentene, 3-pyrroline, and norbornadiene, representing prototypical cyclic, heterocyclic, and bicyclic unsaturated organic molecules, respectively. Each molecule has at least one unsaturated C=C bond. (C) 1997 American Vacuum Society.

引用

页码：1153 / 1158

页数：6

共 15 条

[1] SURFACE INFRARED STUDY OF SI(100)-(2X1)H [J].