A flexure-based mechanism and control methodology for ultra-precision turning operation

被引：151
作者：
Tian, Y. [1 ,2 ]
Shirinzadeh, B. [1 ]
Zhang, D. [2 ]
机构：
[1] Monash Univ, Dept Mech & Aerosp Engn, Robot & Mechatron Res Lab, Clayton, Vic 3800, Australia
[2] Tianjin Univ, Sch Mech Engn, Tianjin 300072, Peoples R China
来源：
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2009年 / 33卷 / 02期
基金：
中国国家自然科学基金; 澳大利亚研究理事会;
关键词：
Flexure-based mechanism; Piezoelectric actuator; Ultra-precision turning; FAST TOOL SERVO; MOTION TRACKING CONTROL; ACTUATOR; DESIGN; TABLE;
D O I：
10.1016/j.precisioneng.2008.05.001
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper presents the methodology for modeling and control of a high precision flexure-based mechanism for ultra-precision turning operation. A high performance piezoelectric actuator is used to driven the flexure-based mechanism. A parallel flexure hinge mechanism is utilized to guide the moving platform and to preload the piezoelectric actuator. A high resolution capacitive sensor is used to measure the displacement of the flexure-based mechanism for closed-loop control. With consideration of the driving circuit, the dynamic model of the flexure-based mechanism has been established. The effect of the driving circuit on the dynamic response of the precision mechanism is investigated. Experimental tests have been carried out to verify the established model and the performance of the flexure-based mechanism. (C) 2008 Elsevier Inc. All rights reserved.
引用
收藏
页码：160 / 166
页数：7
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