Comparison of first moment STEM with conventional differential phase contrast and the dependence on electron dose

被引:31
作者
Mueller-Caspary, Knut [1 ,2 ]
Krause, Florian F. [3 ]
Winkler, Florian [2 ]
Beche, Armand [1 ]
Verbeeck, Johan [1 ]
Van Aert, Sandra [1 ]
Rosenauer, Andreas [3 ]
机构
[1] Univ Antwerp, EMAT, Groenenborgerlaan 171, B-2020 Antwerp, Belgium
[2] Forschungszentrum Julich, Ernst Ruska Ctr Microscopy & Spect Electron, Wilhelm Johnen Str, D-52425 Julich, Germany
[3] Univ Bremen, Inst Solid State Phys, Otto Hahn Allee 1, D-28359 Bremen, Germany
基金
欧洲研究理事会;
关键词
Scanning transmission electron microscopy; Differential phase contrast; Momentum-resolved STEM; Pixelated STEM; DYNAMIC-RANGE; DETECTOR; FIELDS; RECONSTRUCTION; MICROSCOPY;
D O I
10.1016/j.ultramic.2018.12.018
中图分类号
TH742 [显微镜];
学科分类号
摘要
This study addresses the comparison of scanning transmission electron microscopy (STEM) measurements of momentum transfers using the first moment approach and the established method that uses segmented annular detectors. Using an ultrafast pixelated detector to acquire four-dimensional, momentum-resolved STEM signals, both the first moment calculation and the calculation of the differential phase contrast (DPC) signals are done for the same experimental data. In particular, we investigate the ability to correct the segment-based signal to yield a suitable approximation of the first moment for cases beyond the weak phase object approximation. It is found that the measurement of momentum transfers using segmented detectors can approach the first moment measurement as close as 0.13 h/nm in terms of a root mean square (rms) difference in 10 nm thick SrTiO3 for a detector with 16 segments. This amounts to 35% of the rms of the momentum transfers. In addition, we present a statistical analysis of the precision of first moment STEM as a function of dose. For typical experimental settings with recent hardware such as a Medipix3 Merlin camera attached to a probe-corrected STEM, we find that the precision of the measurement of momentum transfers stagnates above certain doses. This means that other instabilities such as specimen drift or scan noise have to be taken into account seriously for measurements that target, e.g., the detection of bonding effects in the charge density.
引用
收藏
页码:95 / 104
页数:10
相关论文
共 42 条
[1]  
Bader R. F., 1990, ENCY COMPUTATIONAL C
[2]   A QUANTUM-THEORY OF MOLECULAR-STRUCTURE AND ITS APPLICATIONS [J].
BADER, RFW .
CHEMICAL REVIEWS, 1991, 91 (05) :893-928
[3]   Analysis of HR-STEM theory for thin specimen [J].
Bosch, Eric G. T. ;
Lazic, Ivan .
ULTRAMICROSCOPY, 2015, 156 :59-72
[4]   DIRECT DETERMINATION OF MAGNETIC DOMAIN-WALL PROFILES BY DIFFERENTIAL PHASE-CONTRAST ELECTRON-MICROSCOPY [J].
CHAPMAN, JN ;
BATSON, PE ;
WADDELL, EM ;
FERRIER, RP .
ULTRAMICROSCOPY, 1978, 3 (02) :203-214
[5]   Towards quantitative, atomic-resolution reconstruction of the electrostatic potential via differential phase contrast using electrons [J].
Close, R. ;
Chen, Z. ;
Shibata, N. ;
Findlay, S. D. .
ULTRAMICROSCOPY, 2015, 159 :124-137
[6]   Maximum-likelihood method for focus-variation image reconstruction in high resolution transmission electron microscopy [J].
Coene, WMJ ;
Thust, A ;
deBeeck, M ;
VanDyck, D .
ULTRAMICROSCOPY, 1996, 64 (1-4) :109-135
[7]  
DEKKERS NH, 1974, OPTIK, V41, P452
[8]   An efficient, simple, and precise way to map strain with nanometer resolution in semiconductor devices [J].
Koch, Christoph T. ;
Oezdoel, V. Burak ;
van Aken, Peter A. .
APPLIED PHYSICS LETTERS, 2010, 96 (09)
[9]  
Lazic I., 2016, Microsc. Microanal, V22, P36, DOI [DOI 10.1017/S1431927616001033, 10.1017/S1431927616001033]
[10]   Phase contrast STEM for thin samples: Integrated differential phase contrast [J].
Lazic, Ivan ;
Bosch, Eric G. T. ;
Lazar, Sorin .
ULTRAMICROSCOPY, 2016, 160 :265-280