Glancing angle deposition: Recent research results

被引：9
|
作者：
Brett, MJ [1 ]
Seto, MW [1 ]
Sit, JC [1 ]
Harris, KD [1 ]
Vick, D [1 ]
Robbie, K [1 ]
机构：
[1] Univ Alberta, Dept Elect Engn, Edmonton, AB T6G 2G7, Canada
来源：
ENGINEERED NANOSTRUCTURAL FILMS AND MATERIALS | 1999年 / 3790卷
关键词：
glancing angle deposition; thermal barrier; porous films; sputtering; mechanical properties;
D O I：
10.1117/12.351243
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Unique thin film microstructures have been fabricated with the Glancing Angle Deposition (GLAD) technique. These porous, thin films can be engineered with a variety of different morphologies to sub-micron dimensions, including helical, post, and chevron or zigzag microstructures. This paper reports some recent results in study and application of films deposited using GLAD, namely: the use of low pressure, long throw sputtering to produce porous titanium films; deposition of porous, structured ZrO2 films for use as thermal barriers; and measurement of the mechanical response of chiral or "microspring" thin films.
引用
收藏
页码：114 / 118
页数：5
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