Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array

被引：0

作者：

van Baar, JJ ^{[1
]}

Wiegerink, RW ^{[1
]}

Krijnen, GJM ^{[1
]}

Lammerink, TSJ ^{[1
]}

Elwenspoek, M ^{[1
]}

机构：

[1] Univ Twente, MESA Res Inst, NL-7500 AE Enschede, Netherlands

来源：

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年

关键词：

thermal flow sensors; fluid parameters; MEMS;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

A two-dimensional resistor structure is presented, which opens the way for advanced flow measuring techniques. In this paper we demonstrate the application as a sensitive flow sensor. The temperature distribution along a heated segmented beam due to a parabolic flow profile has been calculated and experimentally confirmed. The temperature distribution allows measurement of the flow independent of the temperature coefficient of resistance (TCR).

引用

页码：1436 / 1439

页数：4

共 45 条

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