Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array

被引：0

作者：

van Baar, JJ ^{[1
]}

Wiegerink, RW ^{[1
]}

Krijnen, GJM ^{[1
]}

Lammerink, TSJ ^{[1
]}

Elwenspoek, M ^{[1
]}

机构：

[1] Univ Twente, MESA Res Inst, NL-7500 AE Enschede, Netherlands

来源：

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年

关键词：

thermal flow sensors; fluid parameters; MEMS;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

A two-dimensional resistor structure is presented, which opens the way for advanced flow measuring techniques. In this paper we demonstrate the application as a sensitive flow sensor. The temperature distribution along a heated segmented beam due to a parabolic flow profile has been calculated and experimentally confirmed. The temperature distribution allows measurement of the flow independent of the temperature coefficient of resistance (TCR).

引用

页码：1436 / 1439

页数：4

共 45 条

[31] MINIATURIZED FLOW SENSOR BASED ON THERMAL FEEDBACK AND DIGITIZED POWER DISTRIBUTION [J].

Huang, Minghao ;

Izhar ;

Song, Xiangyu ;

Hong, Linze ;

Xu, Ruining ;

Xu, Wei .

2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, 2024, :817-820

[32] Compact Micro Thermal Sensor Based on Silicon Thermocouple Junction and Suspended Fluidic Channel [J].

Wang, Zhuqing ;

Kimura, Mitsuteru ;

Inomata, Naoki ;

Li, Jinhua ;

Ono, Takahito .

IEEE SENSORS JOURNAL, 2020, 20 (19) :11122-11127

[33] A self-resonant micro flow velocity sensor based on a resonant frequency shift by flow-induced vibration [J].

Seo, Young Ho ;

Kim, Byeong Hee .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (07)

[34] Micro-beam resonator parametrically excited by electro-thermal Joule’s heating and its use as a flow sensor [J].

Ben Torteman ;

Yoav Kessler ;

Alexander Liberzon ;

Slava Krylov .

Nonlinear Dynamics, 2019, 98 :3051-3065

[35] Micro-beam resonator parametrically excited by electro-thermal Joule's heating and its use as a flow sensor [J].

Torteman, Ben ;

Kessler, Yoav ;

Liberzon, Alexander ;

Krylov, Slava .

NONLINEAR DYNAMICS, 2019, 98 (04) :3051-3065

[36] Computer modeling of flow and heat transfer in a MEMS based air micro-jet array impingement cooling device [J].

Selvam, RP ;

Khater, J ;

Leland, JE ;

Ponnappan, R .

1999 INTERNATIONAL SYMPOSIUM ON MICROELECTRONICS, PROCEEDINGS, 1999, 3906 :201-206

[37] Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors [J].

Scholles, M. ;

Braeuer, A. ;

Frommhagen, K. ;

Gerwig, Ch. ;

Lakner, H. ;

Schenk, H. ;

Schwarzenberg, M. .

MOEMS AND MINIATURIZED SYSTEMS VI, 2007, 6466

[38] Development of Highly Sensitive and Thermostable Microelectromechanical System Pressure Sensor Based on Array-Type Aluminum-Silicon Hybrid Structures [J].

Li, Min ;

Xiao, Yang ;

Zhang, Jiahong ;

Liu, Qingquan ;

Jiang, Xianglong ;

Hua, Wenhao .

MICROMACHINES, 2024, 15 (09)

[39] Miniaturized optical module for projection of arbitrary images based on two-dimensional resonant micro scanning mirrors [J].

Scholles, M ;

Bräuer, A ;

Frommhagen, K ;

Gerwig, C ;

Höfer, B ;

Jung, E ;

Lakner, H ;

Schenk, H ;

Schneider, B ;

Schreiber, P ;

Wolter, A .

Optical Scanning 2005, 2005, 5873 :72-83

[40] Two-axis MEMS-based force sensor for measuring the interaction forces during the sliding of a droplet on a micropillar array [J].

Nguyen Thanh-Vinh ;

Takahashi, Hidetoshi ;

Matsumoto, Kiyoshi ;

Shimoyama, Isao .

SENSORS AND ACTUATORS A-PHYSICAL, 2015, 231 :35-43

← 1 2 3 4 5 →