Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array

被引：0
|
作者：
van Baar, JJ [1 ]
Wiegerink, RW [1 ]
Krijnen, GJM [1 ]
Lammerink, TSJ [1 ]
Elwenspoek, M [1 ]
机构：
[1] Univ Twente, MESA Res Inst, NL-7500 AE Enschede, Netherlands
来源：
TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年
关键词：
thermal flow sensors; fluid parameters; MEMS;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
A two-dimensional resistor structure is presented, which opens the way for advanced flow measuring techniques. In this paper we demonstrate the application as a sensitive flow sensor. The temperature distribution along a heated segmented beam due to a parabolic flow profile has been calculated and experimentally confirmed. The temperature distribution allows measurement of the flow independent of the temperature coefficient of resistance (TCR).
引用
收藏
页码：1436 / 1439
页数：4
相关论文
共 50 条
  • [1] Sensitivity enhancement of a silicon micro-machined thermal flow sensor
    Roh, SC
    Choi, YM
    Kim, SY
    SENSORS AND ACTUATORS A-PHYSICAL, 2006, 128 (01) : 1 - 6
  • [2] Micro-machined gas sensor array based on metal film micro-heater
    Mo, YW
    Okawa, Y
    Tajima, M
    Nakai, T
    Yoshiike, N
    Natukawa, K
    SENSORS AND ACTUATORS B-CHEMICAL, 2001, 79 (2-3) : 175 - 181
  • [3] A micro-machined acoustic sensor array for fuel level indication
    Osborne, R
    Ward, M
    Dawkins, K
    SENSORS AND ACTUATORS A-PHYSICAL, 2004, 115 (2-3) : 385 - 391
  • [4] Energy efficient micro-machined thermal flow-rate sensor based on transient operation mode
    Shaun, Ferdous
    Sarkar, Sreyash
    Ali, Hany
    Poulichet, Patrick
    Peressutti, Francesco
    Marty, Frederic
    Bourouina, Tarik
    Nefzaoui, Elyes
    Oliveira, Joao Pedro
    2018 SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS AND MOEMS (DTIP), 2018,
  • [5] Micro-machined Millimeter Wave Sensor Array for FM Radar Application
    Trontelj, Janez
    Sesek, Aleksander
    MILLIMETRE WAVE AND TERAHERTZ SENSORS AND TECHNOLOGY V, 2013, 8544
  • [6] Research on two-dimensional silicon micro-machined gyroscope
    Mao, Xu
    Liu, Yu
    Wang, Yin-Nian
    Ding, Ming-Qing
    Zhang, Fu-Xue
    Yadian Yu Shengguang/Piezoelectrics and Acoustooptics, 2007, 29 (03): : 298 - 301
  • [7] Micro-machined piezoelectric membrane-based immunosensor array
    Xu, Ting
    Wang, Zhihong
    Miao, Jianmin
    Yu, Ling
    Li, Chang Ming
    BIOSENSORS & BIOELECTRONICS, 2008, 24 (04): : 638 - 643
  • [8] An electronic nose system based on a micro-machined gas sensor array to assess the freshness of sardines
    El Barbri, N.
    Mirhisse, J.
    Ionescu, R.
    El Bari, N.
    Correig, X.
    Bouchikhi, B.
    Llobet, E.
    SENSORS AND ACTUATORS B-CHEMICAL, 2009, 141 (02): : 538 - 543
  • [9] A Piezoelectric Micro-Machined Ultrasonic Transducer Array Based On Flexible Substrate
    Zhu, Qifeng
    Zhang, Lue
    Liu, Huicong
    Chen, Tao
    Sun, Lining
    Le, Xianhao
    Xie, Jin
    2018 13TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS 2018), 2018, : 345 - 348
  • [10] Low Power Consumption Design of Micro-machined Thermal Sensor for Portable Spirometer
    Chiu, Nan-Fu
    Hsiao, Tzu-Chien
    Lin, Chii-Wann
    JOURNAL OF APPLIED SCIENCE AND ENGINEERING, 2005, 8 (03): : 225 - 230
12345