Numerical modeling of electron beams accelerated by the radio frequency boundary sheath

被引：72

作者：

Heil, Brian G. ^{[1
]}

Schulze, Julian ^{[1
]}

Mussenbrock, Thomas ^{[2
]}

Brinkmann, Ralf Peter ^{[2
]}

Czarnetzki, Uwe ^{[1
]}

机构：

[1] V Ruhr Univ Bochum, Inst Expt Phys, D-44787 Bochum, Germany

[2] Ruhr Univ Bochum, Lehrstuhl Theoret Elektrotech, D-44801 Bochum, Germany

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 2008年 / 36卷 / 04期

关键词：

electron beams; plasma devices; plasma heating; plasmas; plasma sheaths;

D O I：

10.1109/TPS.2004.924575

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

The stochastic heating of electrons by the radio frequency boundary sheath in capacitively coupled plasmas is not completely understood or at least agreed upon by researchers. To aid in understanding this phenomena, a conceptually simple simulation of electron heating is presented. A fluid model is used to calculate the electric fields in the discharge, and a Monte Carlo simulation is used to calculate electron distribution functions. The plots of the density of energetic electrons are presented in this paper. They show electron beams that have been accelerated by the sheath.

引用

页码：1404 / 1405

页数：2

共 3 条

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Brinkmann, Ralf Peter
[J]. JOURNAL OF APPLIED PHYSICS, 2007, 102 (09)
[2] Measurements of electron energy distribution in low-pressure RF discharges
Godyak, V. A.
Piejak, R. B.
Alexandrovich, B. M.
[J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 1992, 1 (01) : 36 - 58
[3] Hybrid model for the calculation of ion distribution functions behind a direct current or radio frequency driven plasma boundary sheath
Kratzer, M
Brinkmann, RP
Sabisch, W
Schmidt, H
[J]. JOURNAL OF APPLIED PHYSICS, 2001, 90 (05) : 2169 - 2179

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