Determination of the Diameter and Depth of Substance Ablation Craters during Nanosecond Laser Pulses Using Computer Modeling

被引：0

作者：

Shchekin, A. S. ^{[1
,2
]}

Petrovskiy, V. N. ^{[1
]}

Gavrikov, A. A. ^{[1
,2
]}

Marin, D. V. ^{[1
]}

Ivanov, A. A. ^{[1
]}

机构：

[1] Natl Res Nucl Univ MEPhI, Moscow Engn Phys Inst, Moscow 115409, Russia

[2] IPG IRE Polus, Fryazino 141195, Russia

来源：

PHYSICS OF ATOMIC NUCLEI | 2022年 / 85卷 / 11期

关键词：

computer modeling; laser ablation; laser processing;

D O I：

10.1134/S1063778822100556

中图分类号：

O57 [原子核物理学、高能物理学];

学科分类号：

070202 ;

摘要：

This paper presents the construction of a computer model of crater formation during nanosecond laser evaporation of matter based on the example of monocrystalline silicon. The computer simulation is used to determine the dynamics of crater formation on the material surface exposed to nanosecond laser pulses. The diameter of the obtained crater and its depth were evaluated. The corresponding experiments on laser ablation of monocrystalline silicon were also carried out. Analysis of experimental data and simulation results showed that depending on the pulse duration and energy density of laser radiation the mechanism of material removal changes. Thus, the presence of the liquid phase in the ablation process seriously affects the crater depth and diameter for the entire range of energy densities from 0.4 to 104.0 J/cm(2). It is shown that the computer model makes it possible to determine the volume of removed material due to evaporation and evaluate the effect of the liquid phase on crater characteristics.

引用

页码：1913 / 1919

页数：7

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