Controllable atomic layer deposition of one-dimensional nanotubular TiO2

被引:58
作者
Meng, Xiangbo [1 ]
Banis, Mohammad Norouzi [1 ]
Geng, Dongsheng [1 ]
Li, Xifei [1 ]
Zhang, Yong [1 ]
Li, Ruying [1 ]
Abou-Rachid, Hakima [2 ]
Sun, Xueliang [1 ]
机构
[1] Univ Western Ontario, Dept Mech & Mat Engn, London, ON N6A 5B8, Canada
[2] Def Res & Dev Canada Valcartier, Quebec City, PQ G3J 1X5, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
Atomic layer deposition; Titanium oxide; Nanotubes; Anodic aluminum oxide; Carbon nanotubes; ANODIC ALUMINUM-OXIDE; TITANIUM-DIOXIDE; THIN-FILMS; NANOSTRUCTURED MATERIALS; ARRAYS; GROWTH; ISOPROPOXIDE; TEMPERATURE; FABRICATION; TEMPLATES;
D O I
10.1016/j.apsusc.2012.11.116
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
This study aimed at synthesizing one-dimensional (1D) nanostructures of TiO2 using atomic layer deposition (ALD) on anodic aluminum oxide (AAO) templates and carbon nanotubes (CNTs). The precursors used are titanium tetraisopropoxide (TTIP, Ti(OCH(CH3)(2))(4)) and deionized water. It was found that the morphologies and structural phases of as-deposited TiO2 are controllable through adjusting cycling numbers of ALD and growth temperatures. Commonly, a low temperature (150 degrees C) produced amorphous TiO2 while a high temperature (250 degrees C) led to crystalline anatase TiO2 on both AAO and CNTs. In addition, it was revealed that the deposition of TiO2 is also subject to the influences of the applied substrates. The work well demonstrated that ALD is a precise route to synthesize 1D nanostructures of TiO2. The resultant nanostructured TiO2 can be important candidates in many applications, such as water splitting, solar cells, lithium-ion batteries, and gas sensors. (c) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:132 / 140
页数:9
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