High resolution real-time full-field interference microscopy

被引：0

作者：

Dubois, A ^{[1
]}

Lebec, M ^{[1
]}

Beaurepaire, E ^{[1
]}

Lévêque, S ^{[1
]}

Boccara, C ^{[1
]}

机构：

[1] Ecole Super Phys & Chim Ind, Lab Opt, CNRS, Unite Propre Rech A0005, F-75005 Paris, France

来源：

THREE-DIMENSIONAL AND MULTIDIMENSIONAL MICROSCOPY: IMAGE ACQUISITION AND PROCESSING VI, PROCEEDINGS OF | 1999年 / 3605卷

关键词：

interference microscopy; optical coherence tomography; CCD camera;

D O I：

10.1117/12.347563

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We have built an interference microscope that produces in real-time images of cross-section slices located at adjustable depths inside 3-D objects. The microscope is based on a Michelson-type polarization interferometer. A light emitting diode (LED), used as an optical source at lambda = 840 nm with short coherence length, provides optical sectioning ability with better than 10 mu m resolution in the depth dimension. By using high numerical aperture objective lenses (NA = 0.95), the depth resolution can be improved to better than 1 mu m, in good agreement with theory. Images can be produced at the rate of 50 per second using a multiplexed lock-in detection and MMX assembler-optimized calculation routines. Cross-section images inside an onion and at different depths in a multilayer silicon integrated circuit are presented.

引用

页码：13 / 20

页数：8

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