Monolithic erbium- and ytterbium-doped microring lasers on silicon chips

被引:87
作者
Bradley, Jonathan D. B. [1 ]
Hosseini, Ehsan Shah [1 ]
Purnawirman [1 ]
Su, Zhan [1 ]
Adam, Thomas N. [2 ]
Leake, Gerald [2 ]
Coolbaugh, Douglas [2 ]
Watts, Michael R. [1 ]
机构
[1] MIT, Elect Res Lab, Photon Microsyst Grp, Cambridge, MA 02139 USA
[2] SUNY Albany, Coll Nanoscale Sci & Engn, Albany, NY 12203 USA
关键词
WAVE-GUIDE LASER; NITRIDE MICRODISK; NARROW-LINEWIDTH; RECENT PROGRESS; ON-CHIP; THRESHOLD; MICROCAVITY; RESONATORS; AL2O3ER3+; GAIN;
D O I
10.1364/OE.22.012226
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We demonstrate monolithic 160-mu m-diameter rare-earth-doped microring lasers using silicon-compatible methods. Pump light injection and laser output coupling are achieved via an integrated silicon nitride waveguide. We measure internal quality factors of up to 3.8 x 10(5) at 980 nm and 5.7 x 10(5) at 1550 nm in undoped microrings. In erbium-and ytterbium-doped microrings we observe single-mode 1.5-mu m and 1.0-mu m laser emission with slope efficiencies of 0.3 and 8.4%, respectively. Their small footprints, tens of microwatts output powers and sub-milliwatt thresholds introduce such rare-earth-doped microlasers as scalable light sources for silicon-based microphotonic devices and systems. (C) 2014 Optical Society of America
引用
收藏
页码:12226 / 12237
页数:12
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