Physical properties of lanthanum monosulfide thin films grown on (100) silicon substrates

被引:18
作者
Cahay, M [1 ]
Garre, K
Wu, X
Poitras, D
Lockwood, DJ
Fairchild, S
机构
[1] Univ Cincinnati, ECECS Dept, Cincinnati, OH 45221 USA
[2] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON K1A 0R6, Canada
[3] USAF, Res Lab, Wright Patterson AFB, OH 45433 USA
关键词
D O I
10.1063/1.2201998
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thin films of lanthanum monosulfide (LaS) have been deposited on Si (100) substrates by pulsed laser deposition. The films are golden yellow in appearance with a mirrorlike surface morphology and a sheet resistance around 0.1 Omega/rectangle, as measured using a four-probe measurement technique. The thin films are characterized by atomic force microscopy (AFM), x-ray diffraction (XRD) analysis, high resolution transmission electron microscopy (HRTEM), ellipsometry, and Raman spectroscopy. The root-mean-square variation of (1 mu m thick) film surface roughness measured over a 1 mu m(2) area by AFM was found to be 1.74 nm. XRD analysis of fairly thick films (micrometer size) reveals the growth of the cubic rocksalt structure with a lattice constant of 5.863(7) A, which is close to the bulk LaS value. HRTEM images reveal that the films are comprised of nanocrystals separated by regions of amorphous material. Two beam bright field TEM images show that there is a strain contrast in the Si substrate right under the interface with the LaS film and penetrating into the Si substrate. This suggests that there is an initial epitaxial-like growth of the LaS film on the Si substrate that introduces a strain as a result of the 8% lattice mismatch between the film and substrate. Ellipsometry measurements of the LaS films are well characterized by a Drude-Lorentz model from which an electron concentration of about 2.52x10(22) cm(-3) and a mobility around 8.5 cm(2)/V s are derived. Typical crystalline LaS features were evident in Raman spectra of the films, but the spectra also revealed their disordered (polycrystalline) nature. (c) 2006 American Institute of Physics.
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页数:6
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