Real time optical 3D nanoscope using phase contrast digital holography

被引：0
作者：
Kim, D. [1 ]
Zvyagin, A. [2 ]
Lee, H. [3 ]
Cho, Y. [4 ]
机构：
[1] Chonbuk Natl Univ, Div Mech Syst Engn, Jeonju, South Korea
[2] Macquarie Univ, Dept Phys, Sydney, NSW, Australia
[3] Korea Adv Inst Sci & Technol, Dept Mech Engn, Daejeon, South Korea
[4] KRISS, Adv Technol Div, Daejeon, South Korea
来源：
PHYSICS OF SEMICONDUCTORS: 30TH INTERNATIONAL CONFERENCE ON THE PHYSICS OF SEMICONDUCTORS | 2011年 / 1399卷
基金：
新加坡国家研究基金会;
关键词：
scatterometry; angle resolved ellipsometry; optical 3D nano-scope; digital holography; defect inspection;
D O I：
10.1063/1.3666748
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We describe a novel real time optical 3D nanoscope scheme that can be applied for both metrology and inspection in various semiconductor fields. The optical 3D nanoscope proposed in this paper is based on off-axis phase contrast digital holography.
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页数：2
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