Micro/nano structures induced by femtosecond laser to enhance light extraction of GaN-based LEDs

被引：19

作者：

Chang, Tien-Li ^{[1
]}

Chen, Zhao-Chi ^{[2
,3
]}

Lee, Yeeu-Chang ^{[2
,3
]}

机构：

[1] Natl Taiwan Normal Univ, Dept Mechatron Technol, Taipei 10644, Taiwan

[2] Chung Yuan Christian Univ, Dept Mech Engn, Chungli 32023, Taiwan

[3] Chung Yuan Christian Univ, Ctr Nanotechnol, Chungli 32023, Taiwan

来源：

OPTICS EXPRESS | 2012年 / 20卷 / 14期

关键词：

SURFACE-STRUCTURES; EMITTING-DIODES; PULSES; OUTPUT;

D O I：

10.1364/OE.20.015997

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Surface texturing has been widely adopted to enhance the light extraction efficiency of light-emitting diodes (LEDs), and chemical etching is a technique commonly used to produce surface texturing. This study employed femtosecond lasers to apply ITO films directly onto the surface of LEDs to generate periodic micro/nanostructures and roughen the surface without contact or chemical substances. As a result, photons emitted in the active region escape into the free space, due to the scattering effect produced by texturing. This study discovered that light-emitting efficiency increases with surface roughness, and achieved an improvement of 18%. Caution regarding laser fluence was required during laser processing to avoid damaging the LED beneath the ITO film, which could detract from the electrical characteristics. (C) 2012 Optical Society of America

引用

页码：15997 / 16002

页数：6

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