Determination of surface waviness using radius of curvature measurement with laser scanning technique

被引：0

作者：

Pienkos, T

Gladyszewski, L

Proszynski, A

Chocyk, D

Gladyszewski, G

机构：

[1] Marie Curie Sklodowska Univ, Inst Phys, PL-20031 Lublin, Poland

[2] Lublin Univ Technol, Inst Phys, PL-20618 Lublin, Poland

来源：

OPTICA APPLICATA | 2005年 / 35卷 / 03期

关键词：

waviness; curvature; profilometer;

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A method for obtaining the shape of a surface investigated with a laser scanning curvature measurement is presented. Additional simple analysis of raw experimental data allows one to determine waviness of the sample. The accuracy of the method and comparison of the results obtained with the method and commercial profilometer are also described.

引用

页码：503 / 507

页数：5