A high-sensitivity compact gas concentration sensor using ultraviolet light absorption with a heating function for a high-precision trimethyl aluminum gas supply system

被引：4
作者：
Ishii, Hidekazu [1 ]
Nagase, Masaaki [2 ]
Ikeda, Nobukazu [2 ]
Shiba, Yoshinobu [1 ]
Shirai, Yasuyuki [3 ]
Kuroda, Rihito [1 ]
Sugawa, Shigetoshi [1 ,3 ]
机构：
[1] Tohoku Univ, Grad Sch Engn, Aoba Ku, 6-6-10 Aza Aoba, Sendai, Miyagi, Japan
[2] Fujikin Inc, Suminoe Ku, Osaka 5590031, Japan
[3] Tohoku Univ, New Ind Creat Hatchery Ctr, Aoba Ku, 6-6-10 Aza Aoba, Sendai, Miyagi, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2019年 / 58卷 / SB期
基金：
日本学术振兴会;
关键词：
VAPOR; SPECTROSCOPY; SPECTRA; REACTOR; EPITAXY;
D O I：
10.7567/1347-4065/aafe69
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
This work presents a high-sensitivity, real-time, compact gas concentration sensor using a time-sharing dual-wavelength UV light absorption method developed for a high-precision trimethyl aluminum (TMA) gas supply system. We analyzed the characteristics of TMA, examined a method to increase sensitivity by controlling the gas transition, and fabricated a highly reliable heatable gas cell. The detection circuit demonstrated that TMA can be measured stably using a charge amplifier method that can detect various metal organic gases with high sensitivity. By controlling the sensing temperature to increase the ratio of TMA monomers (which have a higher UV absorbance) to dimers, a detection limit of 62.7 ppm was achieved. (C) 2019 The Japan Society of Applied Physics
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页数：6
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