High tolerance to total ionizing dose of Ω-shaped gate field-effect transistors

被引:44
作者
Gaillardin, Marc
Paillet, Philippe
Ferlet-Cavrois, Veronique
Cristoloveanu, Sorin
Faynot, Olivier
Jahan, Carine
机构
[1] ENSERG, IMEP, F-38016 Grenoble 1, France
[2] CEA DIF, F-91680 Bruyeres Le Chatel, France
[3] CEA, LETI, F-38054 Grenoble 9, France
关键词
D O I
10.1063/1.2206097
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ionizing radiation effects are investigated in N-channel metal-oxide-semiconductor triple-gate field-effect transistors with Omega-shaped gate fin field-effect transistor (FinFET) architecture. The total dose response is shown to be dependent on device geometry. A wide FinFET structure behaves like a single-gate fully depleted silicon-on-insulator transistor, showing a noticeable degradation induced by ionizing radiation. By contrast, an optimized narrow FinFET shows a drastically reduced influence of ionizing radiation thanks to the efficient electrostatic control of the potential in the device provided by the Omega gate. A narrow FinFET is shown to be naturally tolerant to a significant total dose exposure.
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页数:3
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