Micro-vibration stage using piezo actuators

被引：34

作者：

Guo, Jiang ^{[1
]}

Chee, Sze Keat ^{[2
]}

Yano, Takeshi ^{[2
]}

Higuchi, Toshiro ^{[1
]}

机构：

[1] Univ Tokyo, Dept Precis Engn, Sch Engn, Bunkyo Ku, Tokyo, Japan

[2] Mechano Transformer Corp, Kawasaki Business Incubat Ctr, Saiwai Ku, Kawasaki, Kanagawa, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2013年 / 194卷

关键词：

Vibration stage; Piezo actuators; Stroke magnifying mechanism; Vibration trace; OPERATION;

D O I：

10.1016/j.sna.2013.01.025

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a novel micro-vibration stage composed of four piezo actuators and a flexure hinge is proposed and developed. Each piezo actuator is developed by a new type of stroke magnifying mechanism incorporated with a multi-stacked PZT (lead zirconate titanate) and it is capable of performing micro vibrating motion. The flexure hinge, used to connect the piezo actuators, is designed to reduce the mutual interference of the linear motion of piezo actuators between two orthogonal directions and realize the in-plane parallel kinematic 2D vibration. According to the experimental results, the micro-vibration stage can generate large vibration amplitude up to 100 mu m in two orthogonal directions independently at a frequency of 1100 Hz, and the vibration traces like line, circle and ellipse are acquired. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：119 / 127

页数：9

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