In situ small-angle x-ray scattering study of nanostructure evolution during decomposition of arc evaporated TiAlN coatings

被引：55
作者：
Oden, M. [1 ]
Rogstrom, L. [1 ]
Knutsson, A. [1 ]
Terner, M. R. [2 ]
Hedstrom, P. [2 ]
Almer, J. [3 ]
Ilavsky, J. [3 ]
机构：
[1] Linkoping Univ, Dept Phys Chem & Biol, SE-58183 Linkoping, Sweden
[2] Lulea Univ Technol, SE-97187 Lulea, Sweden
[3] Argonne Natl Lab, Adv Photon Source, Argonne, IL 60439 USA
来源：
APPLIED PHYSICS LETTERS | 2009年 / 94卷 / 05期
基金：
瑞典研究理事会;
关键词：
aluminium compounds; ceramics; nanoparticles; nanotechnology; pyrolysis; titanium compounds; vacuum deposited coatings; X-ray scattering;
D O I：
10.1063/1.3078283
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Small-angle x-ray scattering was used to study in situ decomposition of an arc evaporated TiAlN coating into cubic-TiN and cubic-AlN particles at elevated temperature. At the early stages of decomposition particles with ellipsoidal shape form, which grow and change shape to spherical particles at higher temperatures. The spherical particles grow at a rate of 0.18 A/degrees C while coalescing.
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页数：3
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