Role of film thickness on the properties of ZnO thin films grown by sol-gel method

被引：168

作者：

Kumar, Vinod ^{[1
,2
,6
]}

Singh, Neetu ^{[3
,4
]}

Mehra, R. M. ^{[5
]}

Kapoor, Avinashi ^{[3
]}

Purohit, L. P. ^{[2
]}

Swart, H. C. ^{[6
]}

机构：

[1] Inter Univ Accelerator Ctr, Mat Sci Grp, New Delhi 110067, India

[2] Gurukula Kangri Univ, Dept Phys, Haridwar 249404, India

[3] Univ Delhi, Dept Elect Sci, New Delhi 110021, India

[4] Univ Delhi, Keshav Mahavidyalaya, Dept Elect, Delhi 110034, India

[5] Sharda Univ, Sch Engn & Technol, Greater Noida 201306, India

[6] Univ Orange Free State, Dept Phys, ZA-9300 Bloemfontein, South Africa

来源：

THIN SOLID FILMS | 2013年 / 539卷

关键词：

Sol-gel; Zinc oxide; Thickness; Surface morphology; Solar cell and gas sensors; OPTICAL-PROPERTIES;

D O I：

10.1016/j.tsf.2013.05.088

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper reports the effect of thickness on the structural, morphological and optical properties of zinc oxide (ZnO) films. Thickness of ZnO films varied from 98 to 366 nm with an increase in the number of deposition cycles. Surface morphological studies showed that the increase in the film thickness causes an increase in the grain size. Roughness of the films has increased from 5.8 to 47 nm with an increase in the film thickness from 98 to 366 nm. The band gap is observed to vary from 3.33 to 3.24 eV with change in the film thickness from 98 to 366 nm. Thickness of the film affected the overall properties of the ZnO films significantly. The large surface roughness makes ZnO films to be potentially used as electrode in solar cells and gas sensing applications. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：161 / 165

页数：5

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