Effect of laser power on orientation and microstructure of Ba2TiO4 film prepared by laser chemical vapor deposition

被引：1

作者：

Guo, Dongyun ^{[1
,2
,3
]}

Goto, Takashi ^{[1
]}

Wang, Chuanbin ^{[2
,3
]}

Shen, Qiang ^{[2
,3
]}

Zhang, Lianmeng ^{[2
,3
]}

机构：

[1] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan

[2] Wuhan Univ Technol, State Key Lab Adv Technol Mat Synth & Proc, Wuhan 430070, Peoples R China

[3] Wuhan Univ Technol, Sch Mat Sci & Engn, Wuhan 430070, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2012年 / 258卷 / 20期

关键词：

Ba2TiO4; film; Laser chemical vapor deposition; Orientation; Laser power; BARIUM ORTHOTITANATE; DIELECTRIC-PROPERTIES;

D O I：

10.1016/j.apsusc.2012.04.104

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Ba2TiO4 films were prepared on Pt/Ti/SiO2/Si substrates by laser chemical vapor deposition method. The effect of laser power (P-L) on orientation and microstructure was investigated. With increasing PL from 52 to 93 W, the deposition temperature (T-dep) increased from 845 to 946 K. With increasing T-dep from 845 to 927 K, the preferred orientation of Ba2TiO4 films changed from (0 9 1) to (1 0 3), the surface morphologies changed from faceted to rectangular, and the columnar cross-section became thicker. The films prepared at high T-dep (931-946 K) had the porous cross-section consisted of powder-like grains. Ba2TiO4 film prepared at 881 K had high deposition rate (R-dep) of 51.4 mu m h(-1), which was advantageous to industrial production. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：7860 / 7863

页数：4

共 16 条

[1] Synthesis of nanometer-sized particles of barium orthotitanate prepared through a modified reverse micellar route: Structural characterization, phase stability and dielectric properties [J].