Diagnostics of plasma electron density and collision frequency of fluorescent lamp using microwave transmission diagnostics

被引:7
作者
Liu, Yutao [1 ,2 ]
Hou, Zhongyu [1 ,2 ]
机构
[1] Shanghai Jiao Tong Univ, Sch Elect Informat & Elect Engn, Shanghai 200030, Peoples R China
[2] Natl Key Lab Micro Nano Fabricat Technol, Shanghai, Peoples R China
来源
SECOND INTERNATIONAL CONFERENCE ON PHYSICS, MATHEMATICS AND STATISTICS | 2019年 / 1324卷
基金
中国国家自然科学基金; 中国博士后科学基金;
关键词
LANGMUIR PROBE;
D O I
10.1088/1742-6596/1324/1/012073
中图分类号
O1 [数学];
学科分类号
0701 ; 070101 ;
摘要
According to the propagation characteristics of the microwave in the plasma, the collision frequency and electron density in the plasma can be simultaneously obtained by measuring the attenuation and phase shift. A new method is proposed to diagnose the plasma in the T8 and T4 fluorescent lamps. According to the experimental results, the electron density of the T8 and T4 fluorescent lamps range from 0.8 x 10(11)/cm(3) to 5.3 x 10(11)/cm(3) and 1.4 x 10(11)/cm(3) to 8.1 x 10(11)/cm(3) respectively. Besides, the collision frequency of T8 and T4 are (2 - 7) x 10(10)Hz and (2.9 - 7.4) x 10(10) Hz respectively. This is basically consistent with the diagnostics results of the two-probe diagnostic method. Moreover, the S-parameters simulation results using the measured plasma parameters based on the Drude's model are also consistent with the experimental results.
引用
收藏
页数:8
相关论文
共 18 条
[1]   Local thermodynamic equilibrium in rapidly heated high energy density plasmas [J].
Aslanyan, V. ;
Tallents, G. J. .
PHYSICS OF PLASMAS, 2014, 21 (06)
[2]   Application of plasma columns to radiofrequency antennas [J].
Borg, GG ;
Harris, JH ;
Miljak, DG ;
Martin, NM .
APPLIED PHYSICS LETTERS, 1999, 74 (22) :3272-3274
[3]   On the use of Langmuir probes for the diagnosis of atmospheric thermal plasmas [J].
Fang, MTC ;
Zhang, JL ;
Yan, JD .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2005, 33 (04) :1431-1442
[4]   VALIDITY CRITERIA FOR LOCAL THERMODYNAMIC-EQUILIBRIUM IN PLASMA SPECTROSCOPY [J].
FUJIMOTO, T ;
MCWHIRTER, RWP .
PHYSICAL REVIEW A, 1990, 42 (11) :6588-6601
[5]   Thermal equilibrium in gas-discharge plasma of low pressure mercury lamp [J].
Gorbunkov, V. I. ;
Solomonov, V. I. .
INTERNATIONAL CONFERENCE ON ATOMIC AND MOLECULAR PULSED LASERS XII, 2015, 9810
[6]   LANGMUIR PROBE MEASUREMENTS OF A RADIO-FREQUENCY INDUCTION PLASMA [J].
HOPWOOD, J ;
GUARNIERI, CR ;
WHITEHAIR, SJ ;
CUOMO, JJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (01) :152-156
[7]   Time-resolved measurements of electron number density and collision frequency for a fluorescent lamp plasma using microwave diagnostics [J].
Howlader, MK ;
Yang, YQ ;
Roth, JR .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2005, 33 (03) :1093-1099
[8]  
Hutchinson I. H., 2002, PLASMA PHYS CONTROL, V44, P2603, DOI DOI 10.1088/0741-3335/44/12/701
[9]   ION SENSITIVE PROBE - A NEW DIAGNOSTIC METHOD FOR PLASMA IN MAGNETIC FIELDS [J].
KATSUMATA, I ;
OKAZAKI, M .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1967, 6 (01) :123-+
[10]  
KHOSROWBEYGI A, 1994, IEEE MTT-S, P1461, DOI 10.1109/MWSYM.1994.335136