Real-Time Diagnosis of Gas-Assisted Hot Embossing Process by Ultrasound

被引:1
作者
Cheng, Chin-Chi [1 ]
Wu, Chia-Lin [2 ]
Wu, Kuo-Ting [3 ]
Yang, Sen-Yeu [2 ]
机构
[1] Hsiuping Univ Sci & Technol, Dept Elect Engn, Taichung, Taiwan
[2] Natl Taiwan Univ, Dept Mech Engn, Taipei 106, Taiwan
[3] Natl Res Council Canada, IMI, Boucherville, PQ J4B 6Y4, Canada
关键词
MELT;
D O I
10.1002/pen.23465
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
An integrated high temperature ultrasonic transducer (HTUT) sensor has been utilized for diagnosis of gas-assisted hot embossing process to fabricate V-cut patterns real-time, nonintrusively and nondestructively. The progression of the process, including plastic plate soften, gas introducing, cooling, and plate detachment inside the chamber, was clearly observed using ultrasound. Ultrasonic velocity could not only indicate the four steps of process, but also evaluate the replicating degree of the V-cut patterns on surface of plastic plate under various temperature and gas pressure settings. The experimental results indicate that the heights of V-cut patterns increase with temperature and gas pressure. POLYM. ENG. SCI., 53:2175-2182, 2013. (c) 2013 Society of Plastics Engineers
引用
收藏
页码:2175 / 2182
页数:8
相关论文
共 26 条
[1]   INJECTION-MOLDING PROCESS-CONTROL - A REVIEW [J].
AGRAWAL, AR ;
PANDELIDIS, IO ;
PECHT, M .
POLYMER ENGINEERING AND SCIENCE, 1987, 27 (18) :1345-1357
[2]   Hot embossing as a method for the fabrication of polymer high aspect ratio structures [J].
Becker, H ;
Heim, U .
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 83 (1-3) :130-135
[3]   Real-time etch-depth measurements of MEMS devices [J].
Bosch-Charpenay, S ;
Xu, JZ ;
Haigis, J ;
Rosenthal, PA ;
Solomon, PR ;
Bustillo, JM .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2002, 11 (02) :111-117
[4]   Ultrasound: A virtual instrument approach for monitoring of polymer melt variables [J].
Brown, EC ;
Collins, TLD ;
Dawson, AJ ;
Olley, P ;
Coates, PD .
JOURNAL OF REINFORCED PLASTICS AND COMPOSITES, 1999, 18 (04) :331-338
[5]  
Chang JH, 2003, MICROSYST TECHNOL, V10, P76, DOI 10.1007/S00542-003-0311-1
[6]   Real-time diagnosis of co-injection molding using ultrasound [J].
Cheng, Chin-Chi ;
Ono, Yuu ;
Jen, Cheng-Kuei .
POLYMER ENGINEERING AND SCIENCE, 2007, 47 (09) :1491-1500
[7]   IN-LINE CHARACTERIZATION OF POLYMER DEFORMATION IN MELT AND SOLID-PHASE PROCESSING [J].
COATES, PD ;
HAYNES, AR ;
SPEIGHT, RG .
POLYMER, 1994, 35 (18) :3831-3843
[8]  
Farrel R. E., 1994, P SPE ANTEC, V692
[9]   Ultrasonic in-line monitoring of polymer extrusion [J].
França, DR ;
Jen, CK ;
Nguyen, KT ;
Gendron, R .
POLYMER ENGINEERING AND SCIENCE, 2000, 40 (01) :82-94
[10]   Replication techniques for diffractive optical elements [J].
Gale, MT .
MICROELECTRONIC ENGINEERING, 1997, 34 (3-4) :321-339