Plasma drift in dual magnetron discharge

被引：15

作者：

Baroch, Pavel ^{[1
]}

Musil, Jindrich ^{[1
]}

机构：

[1] Univ W Bohemia, Dept Phys, Plzen 30614, Czech Republic

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 2008年 / 36卷 / 04期

关键词：

dual magnetron (DM); magnetic field; plasma discharge; plasma drift;

D O I：

10.1109/TPS.2008.924483

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

The distribution and form of the discharge in dual magnetron (DM) depends not only on the polarity of magnets used in both magnetrons but also on the distribution of magnetic field lines. For tilted DM, a naturally created gradient of magnetic field generates a drift of plasma that results in a deflection of the discharge from the plane of symmetry. This deflection of the discharge was observed experimentally. Performed experiments are in a good agreement with the theoretical prediction.

引用

页码：1412 / 1413

页数：2