Three-dimensional magnetic field analyses on the magnetron sputtering system by using Free Mesh Method

被引：1

作者：

Ido, S ^{[1
]}

Hirose, R ^{[1
]}

机构：

[1] Saitama Univ, Fac Engn, Urawa, Saitama 3380825, Japan

来源：

COMPUTER PHYSICS COMMUNICATIONS | 2001年 / 142卷 / 1-3期

关键词：

Free Mesh Method; Finite Element Method; local element; adaptive distribution of node; magnetic field analysis; magnetron sputtering system;

D O I：

10.1016/S0010-4655(01)00367-8

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

A code using the 3-dimensional Finite Element Method (FEM) and Free Mesh Method (FMM) has been developed and applied to the magnetic field analyses in the plasma devices, where a ferromagnetic material is used as a target. An adaptive method is applied to the re-distribution of the nodes. It is shown that this method is useful in the magnetic field analyses. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：338 / 342

页数：5

共 7 条

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