NANOSTRUCTURED ITO LAYERS FOR QCM GAS SENSORS

被引：0
|
作者：
Seidl, J. [1 ]
Jiresova, J. [1 ]
Hofmann, J. [1 ]
Holanek, P. [1 ]
机构：
[1] Univ Chem & Technol, Fac Chem Engn, Dept Phys & Measurements, Tech 5, Prague 16628 6, Czech Republic
来源：
PROCEEDINGS OF THE 5TH INTERNATIONAL CONFERENCE ON CHEMICAL TECHNOLOGY (ICCT) | 2017年
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中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
An investigation of the presence of pollutants is the contemporary trend of public interest. ITO is one of the sensitive materials for detection of these substances. Multilayers with nanostructured ITO with particle size < 50 nm was prepared using the Layer-by-Layer deposition method (LbL). Sensitive multilayer was applied to 1-inch diameter quartz crystal with gold electrodes. Status of deposition was observed during couting process by changing the resonant frequency of the crystal. SEM picture confirms the high porosity of the layer, which improves the adsorption of gas. Our QCM sensor has better sensitivity to the presence of NO2 and H2O than that in previously study based on SnO2.
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页码：284 / 286
页数：3
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