Noncontact measurement of etalon spacing using a retroreflection technique

被引：11
|
作者：
Thomas, PJ [1 ]
Mani, R [1 ]
Khalil, N [1 ]
机构：
[1] Ctr Res Earth & Space Technol, N York, ON M3J 3K1, Canada
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1999年 / 70卷 / 05期
关键词：
D O I：
10.1063/1.1149741
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A novel technique is described for the noncontact determination of the spacings of solid and air-gap etalons of low reflectivity by the retroreflection of a He-Ne laser beam. Gaps as small as 50 mu m were measured with a precision of better than +/-1 mu m. Typical measurement accuracy is better than 2%. (C) 1999 American Institute of Physics. [S0034-6748(99)02005-5].
引用
收藏
页码：2225 / 2229
页数：5
相关论文
共 50 条
  • [1] Noncontact measurement of etalon spacing using a retroreflection technique
    Thomas, Paul J.
    Mani, R.
    Khalil, N.
    Review of Scientific Instruments, 70 (05): : 2225 - 2229
  • [2] A NONCONTACT MEASUREMENT TECHNIQUE FOR PIEZOELECTRIC TRANSDUCERS
    GUILLEMOTAMADEI, MM
    PETIT, L
    LEBRUN, L
    BRIOT, R
    GONNARD, P
    MEASUREMENT SCIENCE AND TECHNOLOGY, 1995, 6 (05) : 458 - 466
  • [3] Noncontact stress measurement technique for concrete structure using photoluminescence piezospectroscopy
    Namgyu Kim
    Jong-Jae Lee
    Journal of Civil Structural Health Monitoring, 2021, 11 : 1189 - 1200
  • [4] Noncontact stress measurement technique for concrete structure using photoluminescence piezospectroscopy
    Kim, Namgyu
    Lee, Jong-Jae
    JOURNAL OF CIVIL STRUCTURAL HEALTH MONITORING, 2021, 11 (05) : 1189 - 1200
  • [5] NONCONTACT MEASUREMENT OF ULTRASONIC VELOCITY IN LIQUID USING PULSED PHOTOACOUSTIC TECHNIQUE
    王钦华
    黄孟才
    苏州大学学报(自然科学), 1993, (02) : 156 - 160
  • [6] NONCONTACT TECHNIQUE FOR LOCAL MEASUREMENT OF SEMICONDUCTOR RESISTIVITY
    BRYANT, CA
    GUNN, JB
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1965, 36 (11): : 1614 - &
  • [7] CIE ACTIVITIES IN THE MEASUREMENT OF RETROREFLECTION
    MOERMAN, JJB
    COLOR RESEARCH AND APPLICATION, 1982, 7 (03): : 231 - 234
  • [8] Noncontact electrical resistivity measurement technique for molten metals
    Rhim, WK
    Ishikawa, T
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (10): : 3628 - 3633
  • [9] Noncontact sheet resistance measurement technique for wafer inspection
    Kempa, K
    Rommel, JM
    Litovsky, R
    Becla, P
    Lojek, B
    Bryson, F
    Blake, J
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (12): : 5577 - 5581
  • [10] A noncontact laser technique for circular contouring accuracy measurement
    Wang, C
    Griffin, B
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2001, 72 (02): : 1594 - 1596
12345