Synthesis of chromium nitride films by ion-beam-enhanced-deposition

被引：6

作者：

Fu, YQ ^{[1
]}

Zhu, XD ^{[1
]}

Tang, B ^{[1
]}

Hu, XF ^{[1
]}

He, JW ^{[1
]}

Xu, KW ^{[1
]}

机构：

[1] Xian Jiao Tong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China

来源：

MATERIALS LETTERS | 1999年 / 40卷 / 04期

基金：

中国国家自然科学基金;

关键词：

ion-beam-enhanced-deposition; CrN film; microstructure; crystalline structure; microhardness; tribology;

D O I：

10.1016/S0167-577X(99)00074-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Chromium nitride (CrN) thin films were synthesized by ion-beam-enhanced-deposition (IBED) process. Results showed that the ion bombardment energy and the ion beam current had significant effects on microstructure, microhardness, crystalline structure and tribological behavior of thin films. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：192 / 197

页数：6

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