Effect of Al Content on Structure and Properties of Ti1-xAlxN Hard Film Prepared by Multi-arc Ion Plating

被引：4

作者：

Lu, Long ^{[1
,2
]}

Feng, Guangguang ^{[3
]}

Ren, Minghao ^{[3
]}

Zhang, Huixia ^{[1
]}

Lyu, Sungki ^{[4
]}

机构：

[1] Huaihai Inst Technol, Coll Mech Engn, Lianyungang 222005, Jiangsu, Peoples R China

[2] Chongqing Univ, State Key Lab Mech Transmiss, Chongqing 400044, Peoples R China

[3] Jiangsu Univ Sci & Technol, Dept Mat, Zhenjiang 212003, Jiangsu, Peoples R China

[4] Gyeongsang Nati Univ, Sch Mech & Aerosp Eng, ReCAPT K MEM R&D Cluster, Jinju 660701, South Korea

来源：

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING | 2013年 / 14卷 / 01期

关键词：

Multi-arc ion plating; Ti1-xAlxN; Al content; WEAR; DEPOSITION; COATINGS; GEAR; ALUMINUM; MODEL;

D O I：

10.1007/s12541-013-0022-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The compound technology of ion nitriding and multi-arc ion plating is adopted to make Ti1-xAlxN film on 40 Cr. The influence of Al content to the structure and functions of film is analyzed through SEM (Scanning Electron Telescope), XRD analyzer, micro hardness tester and scratch tester. It indicated that the Al content has obvious influence on the structure and function of film. The more Al content, the more droplets in the film. Phase structure tends to multiphase composite structures. The micro hardness and bonding force will be increased first, and then decreased with the rising Al content.

引用

页码：161 / 164

页数：4

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