Continuous-membrane surface-micromachined silicon deformable mirror

被引:101
作者
Bifano, TG
Mali, RK
Dorton, JK
Perreault, J
Vandelli, N
Horenstein, MN
Castanon, DA
机构
[1] Boston University, College of Engineering, Boston
[2] Boston University, Prec. Eng. Research Laboratory
[3] University of California, Berkeley, CA
[4] Spire Corporation, Bedford, MA
[5] Dept. of Elec. and Comp. Engineering, Boston University
[6] Boston University, Micro-opto-mechanical Systems Team
[7] ALPHATECH, Inc., Burlington, MA
关键词
micro-opto-electro-mechanical systems; deformable mirror; surface-micromachined; adaptive optics;
D O I
10.1117/1.601598
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The authors describe the development of a new type of micromachined device designed for use in correcting optical aberrations. A nine-element continuous deformable mimer was fabricated using surface micromachining. The electromechanical behavior of the deformable mirror was measured. A finite-difference model for predicting the mirror deflections was developed. In addition, novel fabrication techniques were developed to permit the production of nearly planar mirror surfaces. (C) 1997 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页码:1354 / 1360
页数:7
相关论文
共 7 条
  • [1] Krishnamoorthy R, 1996, P SOC PHOTO-OPT INS, V2881, P35, DOI 10.1117/12.251251
  • [2] Development of microelectromechanical deformable mirrors for phase modulation of light
    Mali, RK
    Bifano, TG
    Vandelli, N
    Horenstein, MN
    [J]. OPTICAL ENGINEERING, 1997, 36 (02) : 542 - 548
  • [3] EXPERIMENTAL STUDIES OF A DEFORMABLE MIRROR ADAPTIVE OPTICAL SYSTEM
    PEARSON, JE
    HANSEN, S
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1977, 67 (03) : 325 - 333
  • [4] Timoshenko SP., 1959, Theory of Plates and Shells
  • [5] TYSON RJ, 1990, PRINCIPLES ADAPTIVE
  • [6] FLEXIBLE REFLECTING MEMBRANES MICROMACHINED IN SILICON
    VDOVIN, G
    SARRO, L
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1994, 9 (08) : 1570 - 1572
  • [7] YOUNSE JM, 1993, IEEE SPECTRUM NOV, P27