The authors describe the development of a new type of micromachined device designed for use in correcting optical aberrations. A nine-element continuous deformable mimer was fabricated using surface micromachining. The electromechanical behavior of the deformable mirror was measured. A finite-difference model for predicting the mirror deflections was developed. In addition, novel fabrication techniques were developed to permit the production of nearly planar mirror surfaces. (C) 1997 Society of Photo-Optical Instrumentation Engineers.
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页码:1354 / 1360
页数:7
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Krishnamoorthy R, 1996, P SOC PHOTO-OPT INS, V2881, P35, DOI 10.1117/12.251251