Continuous-membrane surface-micromachined silicon deformable mirror

被引：101
作者：
Bifano, TG
Mali, RK
Dorton, JK
Perreault, J
Vandelli, N
Horenstein, MN
Castanon, DA
机构：
[1] Boston University, College of Engineering, Boston
[2] Boston University, Prec. Eng. Research Laboratory
[3] University of California, Berkeley, CA
[4] Spire Corporation, Bedford, MA
[5] Dept. of Elec. and Comp. Engineering, Boston University
[6] Boston University, Micro-opto-mechanical Systems Team
[7] ALPHATECH, Inc., Burlington, MA
来源：
OPTICAL ENGINEERING | 1997年 / 36卷 / 05期
关键词：
micro-opto-electro-mechanical systems; deformable mirror; surface-micromachined; adaptive optics;
D O I：
10.1117/1.601598
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The authors describe the development of a new type of micromachined device designed for use in correcting optical aberrations. A nine-element continuous deformable mimer was fabricated using surface micromachining. The electromechanical behavior of the deformable mirror was measured. A finite-difference model for predicting the mirror deflections was developed. In addition, novel fabrication techniques were developed to permit the production of nearly planar mirror surfaces. (C) 1997 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页码：1354 / 1360
页数：7
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