Continuous-membrane surface-micromachined silicon deformable mirror

被引：101

作者：

Bifano, TG

Mali, RK

Dorton, JK

Perreault, J

Vandelli, N

Horenstein, MN

Castanon, DA

机构：

[1] Boston University, College of Engineering, Boston

[2] Boston University, Prec. Eng. Research Laboratory

[3] University of California, Berkeley, CA

[4] Spire Corporation, Bedford, MA

[5] Dept. of Elec. and Comp. Engineering, Boston University

[6] Boston University, Micro-opto-mechanical Systems Team

[7] ALPHATECH, Inc., Burlington, MA

来源：

OPTICAL ENGINEERING | 1997年 / 36卷 / 05期

关键词：

micro-opto-electro-mechanical systems; deformable mirror; surface-micromachined; adaptive optics;

D O I：

10.1117/1.601598

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The authors describe the development of a new type of micromachined device designed for use in correcting optical aberrations. A nine-element continuous deformable mimer was fabricated using surface micromachining. The electromechanical behavior of the deformable mirror was measured. A finite-difference model for predicting the mirror deflections was developed. In addition, novel fabrication techniques were developed to permit the production of nearly planar mirror surfaces. (C) 1997 Society of Photo-Optical Instrumentation Engineers.

引用

页码：1354 / 1360

页数：7

共 7 条

[1]

Krishnamoorthy R, 1996, P SOC PHOTO-OPT INS, V2881, P35, DOI 10.1117/12.251251

[2] Development of microelectromechanical deformable mirrors for phase modulation of light [J].