Thermal response of AlN and CNx films as coatings of thin film anemometers

被引：1
作者：
Arroyo, J. [1 ]
Silvestre, S. [1 ]
Coll, A. [1 ]
Castaner, L. [1 ]
机构：
[1] Univ Politecn Cataluna, Dept Elect Engn, Micro & Nano Tech Grp, ES-08034 Barcelona, Spain
来源：
MEASUREMENT | 2013年 / 46卷 / 04期
关键词：
Thin film anemometers; AlN; CNx; TEMPERATURE; ATMOSPHERE; METHANE; SENSOR; REMS;
D O I：
10.1016/j.measurement.2012.12.003
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Layers of AlN and CNx were investigated as suitable films to coat thin film anemometers because they are simultaneously electrical isolators and thermal conductors. Thermal time constants were measured and thermal equivalent models are proposed in this work. AlN performed better in the experiments. (C) 2012 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1421 / 1426
页数：6
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