Study of ZrO2/Al2O3 multilayers

被引：34
作者：
Gao, PT [1 ]
Meng, LJ
dos Santos, MP
Teixeira, V
Andritschky, M
机构：
[1] Univ Minho, Dept Fis, P-4710 Braga, Portugal
[2] Inst Super Engn Porto, Dept Fis, P-4200 Oporto, Portugal
来源：
VACUUM | 2002年 / 64卷 / 3-4期
关键词：
D O I：
10.1016/S0042-207X(01)00311-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In the present work we present a study of ZrO2/Al2O3 multilayers prepared by DC reactive sputtering with different ZrO2 layer thicknesses. To test their thermal stability, the multilayers were annealed at high temperature. A possible reason for the tetragonal phase to be stabilised in the multilayers is discussed. X-ray diffraction and Raman spectroscopy have been used to characterise the structure and the residual stress of the multilayers. (C) 2002 Elsevier Science Ltd. All rights reserved.
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收藏
页码：267 / 273
页数：7
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