Development of New Oxygen Sensor by Microfabrication of Single-Crystal CuFeTe2 Thin Films

被引：0

作者：

Kozaki, Masatoshi ^{[1
]}

Higuchi, Yuichiro ^{[1
]}

Ikeda, Akihiro ^{[1
]}

Kuriyaki, Hisao ^{[1
]}

Toko, Kiyoshi ^{[1
]}

机构：

[1] Kyushu Univ, Grad Sch Informat Elect Engn, Nishi Ku, Fukuoka 8190395, Japan

来源：

SENSORS AND MATERIALS | 2013年 / 25卷 / 07期

基金：

日本学术振兴会;

关键词：

oxygen; gas sensor; intercalation; layered material; microfabrication; SELF-INTERCALATION; COMPOUND CUFETE2; TIS2;

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A new oxygen sensor based on resistance change caused by oxygen intercalation for the layered compound CuFeTe2 (CFT) was developed. A microfabrication process for forming many fine pores on the surface of single-crystal CFT thin films by performing wet etching using photolithography was developed with the aim of reducing the response time of the oxygen sensor. A reproducible response of the fabricated samples to oxygen gas was confirmed when 20% oxygen gas and nitrogen gas were alternately introduced into the sample chamber. The microfabricated sample of the single-crystal CFT thin films showed a response time of 2.5 min to 20% oxygen gas, approximately 34% of that of the single-crystal CFT thin films without fine pores.

引用

页码：471 / 477

页数：7

共 13 条

[1] Conductivity anisotropy and localization of charge carriers in CuFeTe2 single crystals with a layered structure
Abdullaev, F. N.
Kerimova, T. G.
Sultanov, G. D.
Abdullaev, N. A.
[J]. PHYSICS OF THE SOLID STATE, 2006, 48 (10) : 1848 - 1852
[2] Self-Intercalation and Vacancy-Ordering in 6R-CuxTa1+yS2 (x ∼ 0.23, y=0, 0.06)
Ali, Sk Imran
Mondal, Swastik
Prathapa, Siriyara Jagannatha
van Smaalen, Sander
Zoerb, Steffen
Harbrecht, Bernd
[J]. ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 2012, 638 (15): : 2625 - 2631
[3] LOCALIZED IMPURITY LEVEL AND CARRIER CONCENTRATION IN SELF-INTERCALATED TIS2 CRYSTALS
INOUE, M
KOYANO, M
NEGISHI, H
UEDA, Y
SATO, H
[J]. PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1985, 132 (01): : 295 - 303
[4] XPS study of organic/MoO3 hybrid thin films for aldehyde gas sensors: correlation between average Mo valence and sensitivity
Itoh, Toshio
Matsubara, Ichiro
Shin, Woosuck
Izu, Noriya
Nishibori, Maiko
[J]. JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2010, 118 (1375) : 171 - 174
[5] Kakhramanov SS, 2008, INORG MATER+, V44, P13, DOI [10.1134/S0020168508010032, 10.1007/s10789-008-1003-0]
[6] RESISITIVITY RESPONSE TO OXYGEN OF TRANSITION-METAL DICHALCOGENIDE TIS2
KISHIRO, K
TAKEMOTO, S
KURIYAKI, H
HIRAKAWA, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (02): : 1069 - 1073
[7] Kishiro K., 1993, JPN J APPL PHYS, V32, P674
[8] OXYGEN GAS RESPONSE OF LAYERED COMPOUND CUFETE2
KURIYAKI, H
KISHIRO, K
HIRAKAWA, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (08): : 1604 - 1607
[9] PHOTORECHARGEABLE BATTERY USING NEW LAYER COMPOUND CUFETE2
NOMIYAMA, T
KURIYAKI, H
HIRAKAWA, K
[J]. SYNTHETIC METALS, 1995, 71 (1-3) : 2237 - 2238
[10] Rivas-Mendoza A, 2011, REV CUB FIS, V28, P14

← 1 2 →