Effect of Annealing Temperature on the Structural and Electrical Properties of α-Axis-Oriented SrTiO3 Films

被引：2

作者：

Wang Xiao-Fei ^{[1
,3
]}

Hu Qiu-Bo ^{[2
]}

Li Li-Ben ^{[1
,3
]}

Chen Qing-Dong ^{[1
,3
]}

Wang Hui-Xian ^{[1
,3
]}

机构：

[1] Henan Univ Sci & Technol, Sch Phys & Engn, Luoyang 471003, Peoples R China

[2] Luoyang Inst Sci & Technol, Dept Math & Sci, Luoyang 471023, Peoples R China

[3] Luoyang Key Lab Photon & Elect Mat, Luoyang 471003, Peoples R China

来源：

CHINESE PHYSICS LETTERS | 2012年 / 29卷 / 05期

基金：

中国国家自然科学基金;

关键词：

THIN-FILMS; DIELECTRIC-PROPERTIES;

D O I：

10.1088/0256-307X/29/5/056101

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Strontium titanate films with high alpha-axis-orientation [a((100)) = 94.1%] were deposited on (111) Pt/Ti/SiO2/Si substrates by the metal organic deposition process. X-ray diffraction shows that the degree of a-axis orientation increases with increasing annealing temperature. It is found that the dielectric properties are improved by a higher annealing temperature, while the leakage currents are also enhanced, and the possible causes of temperature dependence are discussed.

引用

页数：4

共 26 条

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