Development of a spinodal decomposition model for the example of a heterostructure based on silicon carbide polytypes

被引:1
作者
Davydov, S. Yu. [1 ,2 ]
Lebedev, A. A. [1 ]
Lebedev, S. P. [1 ]
Sitnikova, A. A. [1 ]
Sorokin, L. M. [1 ]
机构
[1] Russian Acad Sci, Ioffe Phys Tech Inst, St Petersburg 194021, Russia
[2] St Petersburg Natl Res Univ Informat Technol Mech, St Petersburg, Russia
基金
俄罗斯基础研究基金会;
关键词
HETEROPOLYTYPE EPITAXY;
D O I
10.1134/S1063785016120051
中图分类号
O59 [应用物理学];
学科分类号
摘要
The transition region of a 3C-SiC/4H-SiC heterostructure constituted by layers of the 3C and 4H polytypes has been studied. A previously proposed spinodal decomposition model was used to estimate the thickness ratio of 4H and 3C layers in comparison with the image furnished by transmission electron microscopy.
引用
收藏
页码:1153 / 1155
页数:3
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